JPH0370835U - - Google Patents

Info

Publication number
JPH0370835U
JPH0370835U JP13097189U JP13097189U JPH0370835U JP H0370835 U JPH0370835 U JP H0370835U JP 13097189 U JP13097189 U JP 13097189U JP 13097189 U JP13097189 U JP 13097189U JP H0370835 U JPH0370835 U JP H0370835U
Authority
JP
Japan
Prior art keywords
housing
plate material
slit
atmosphere
seal member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13097189U
Other languages
Japanese (ja)
Other versions
JPH0731869Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989130971U priority Critical patent/JPH0731869Y2/en
Publication of JPH0370835U publication Critical patent/JPH0370835U/ja
Application granted granted Critical
Publication of JPH0731869Y2 publication Critical patent/JPH0731869Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の一実施例の断面正面図、第2
図は第1図における矢視部の外観図である。 1……真空パツト、3……ハウジング、5……
シール部材、7……ボール、9……下端ブロツク
、11……パツト、17……スリツト、W……板
材。
Figure 1 is a cross-sectional front view of one embodiment of the present invention;
The figure is an external view of the section seen by the arrows in FIG. 1. 1... Vacuum part, 3... Housing, 5...
Seal member, 7...Ball, 9...Lower end block, 11...Put, 17...Slit, W...Plate material.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ハウジング内部の下端開口部に設けられたパツ
トと、このパツトを経て吸入された大気が流通す
る上端通気口に設けられた表面にスリツトを有す
るたシール部材と、前記ハウジング内部を上下動
自在に設けられた前記パツトに前記板材がないか
または前記板材に穴等があるとき前記パツトを経
て吸入され大気によつて前記ハウジング内部を上
方に移動し前記シール部材を閉鎖し前記スリツト
を経て微量の大気を吸入し、前記パツトに穴等が
ない前記板材があるとき吸入が停止された大気に
よつて前記ハウジング内部を下方に移動し前記シ
ール部材を開放するボールと、を備えたことを特
徴とする真空パツト。
A part provided at the lower end opening inside the housing, a seal member having a slit on the surface provided at the upper end vent through which the air sucked through the part flows, and a seal member provided inside the housing so as to be movable up and down. If there is no plate material in the part, or if there is a hole in the plate material, the part is sucked in through the part, moves upward inside the housing by the atmosphere, closes the sealing member, and passes through the slit to remove a small amount of air. and a ball that moves downward inside the housing and opens the sealing member by the atmosphere from which suction is stopped when the plate material without holes or the like is present in the part. Vacuum patch.
JP1989130971U 1989-11-13 1989-11-13 Vacuum pad Expired - Lifetime JPH0731869Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989130971U JPH0731869Y2 (en) 1989-11-13 1989-11-13 Vacuum pad

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989130971U JPH0731869Y2 (en) 1989-11-13 1989-11-13 Vacuum pad

Publications (2)

Publication Number Publication Date
JPH0370835U true JPH0370835U (en) 1991-07-17
JPH0731869Y2 JPH0731869Y2 (en) 1995-07-26

Family

ID=31678504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989130971U Expired - Lifetime JPH0731869Y2 (en) 1989-11-13 1989-11-13 Vacuum pad

Country Status (1)

Country Link
JP (1) JPH0731869Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013066988A (en) * 2011-09-26 2013-04-18 New Japan Radio Co Ltd Semiconductor element transport head

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174895U (en) * 1986-04-25 1987-11-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174895U (en) * 1986-04-25 1987-11-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013066988A (en) * 2011-09-26 2013-04-18 New Japan Radio Co Ltd Semiconductor element transport head

Also Published As

Publication number Publication date
JPH0731869Y2 (en) 1995-07-26

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