JPH0731091B2 - 歪検出器 - Google Patents

歪検出器

Info

Publication number
JPH0731091B2
JPH0731091B2 JP62130878A JP13087887A JPH0731091B2 JP H0731091 B2 JPH0731091 B2 JP H0731091B2 JP 62130878 A JP62130878 A JP 62130878A JP 13087887 A JP13087887 A JP 13087887A JP H0731091 B2 JPH0731091 B2 JP H0731091B2
Authority
JP
Japan
Prior art keywords
resistor
ceramic
strain
ceramic substrate
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62130878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63293432A (ja
Inventor
泰人 矢島
和義 柴田
俊三 間瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP62130878A priority Critical patent/JPH0731091B2/ja
Priority to US07/198,085 priority patent/US4894635A/en
Priority to DE3817905A priority patent/DE3817905A1/de
Publication of JPS63293432A publication Critical patent/JPS63293432A/ja
Publication of JPH0731091B2 publication Critical patent/JPH0731091B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP62130878A 1987-05-27 1987-05-27 歪検出器 Expired - Lifetime JPH0731091B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP62130878A JPH0731091B2 (ja) 1987-05-27 1987-05-27 歪検出器
US07/198,085 US4894635A (en) 1987-05-27 1988-05-24 Strain sensor
DE3817905A DE3817905A1 (de) 1987-05-27 1988-05-26 Formaenderungs-messfuehler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62130878A JPH0731091B2 (ja) 1987-05-27 1987-05-27 歪検出器

Publications (2)

Publication Number Publication Date
JPS63293432A JPS63293432A (ja) 1988-11-30
JPH0731091B2 true JPH0731091B2 (ja) 1995-04-10

Family

ID=15044804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62130878A Expired - Lifetime JPH0731091B2 (ja) 1987-05-27 1987-05-27 歪検出器

Country Status (3)

Country Link
US (1) US4894635A (enExample)
JP (1) JPH0731091B2 (enExample)
DE (1) DE3817905A1 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0363836U (enExample) * 1989-10-26 1991-06-21
US4991283A (en) * 1989-11-27 1991-02-12 Johnson Gary W Sensor elements in multilayer ceramic tape structures
US5142915A (en) * 1990-07-06 1992-09-01 Siemens Automotive L.P. Method for fabrication of force sensing elements by laminating dielectric tape
ES2050018T3 (es) * 1990-07-28 1994-05-01 Endress Hauser Gmbh Co Sensor resistivo de presion.
JP2718563B2 (ja) * 1990-08-28 1998-02-25 日本特殊陶業株式会社 圧力検出器
US5242722A (en) * 1990-10-29 1993-09-07 Matsushita Electric Industrial Co., Ltd. Strain sensor
EP0596711B1 (en) * 1992-11-06 1998-01-21 Texas Instruments Incorporated Method of fabricating a capacitive pressure transducer
US6004644A (en) * 1994-07-26 1999-12-21 Ngk Insulators, Ltd. Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure
JP3280799B2 (ja) * 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
US5436795A (en) * 1994-03-28 1995-07-25 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
US5634999A (en) * 1994-09-06 1997-06-03 Ngk Insulators, Ltd. Method of producing ceramic diaphragm structure having convex diaphragm portion
US5891751A (en) * 1995-06-02 1999-04-06 Kulite Semiconductor Products, Inc . Hermetically sealed transducers and methods for producing the same
KR0174872B1 (ko) * 1995-12-08 1999-02-01 양승택 압 저항 소자 및 그의 제조방법
DE19547472A1 (de) * 1995-12-19 1997-06-26 Pfister Mestechnik Gmbh Kraftmeßvorrichtung
WO1998011499A1 (en) * 1996-09-10 1998-03-19 Personal Biometric Encoders Ltd. Fingerprint digitizer with continuous conductive membrane
DE19643868A1 (de) * 1996-10-30 1998-05-07 Rene Baltus Wägezellenanordnung
US6212958B1 (en) 1998-07-16 2001-04-10 Lincoln Industrial Corporation Flow sensing assembly and method
FR2786564B1 (fr) * 1998-11-27 2001-04-13 Commissariat Energie Atomique Capteur de pression a membrane comportant du carbure de silicium et procede de fabrication
JP2002310814A (ja) * 2001-04-17 2002-10-23 Toyota Central Res & Dev Lab Inc 圧力センサ素子
JP2002310813A (ja) * 2001-04-10 2002-10-23 Toyota Central Res & Dev Lab Inc 荷重センサ素子
DE10342487A1 (de) * 2003-09-15 2005-04-07 Robert Bosch Gmbh Glühstiftkerze mit als Drucksensor ausgebildetem Glühstift
DE102007000364B4 (de) * 2007-07-03 2020-10-15 Wika Alexander Wiegand Gmbh & Co. Kg Manometer mit elektrischem Messwertaufnehmer
JP6340734B2 (ja) 2015-09-18 2018-06-13 Smc株式会社 圧力センサ
JP6410105B2 (ja) * 2015-09-18 2018-10-24 Smc株式会社 圧力センサ及びその製造方法
DE102017113401A1 (de) * 2017-06-19 2018-12-20 Epcos Ag Schichtwiderstand und Dünnfilmsensor
JP6793103B2 (ja) 2017-09-29 2020-12-02 ミネベアミツミ株式会社 ひずみゲージ
JP2019066454A (ja) 2017-09-29 2019-04-25 ミネベアミツミ株式会社 ひずみゲージ、センサモジュール
JP2019184344A (ja) 2018-04-05 2019-10-24 ミネベアミツミ株式会社 ひずみゲージ及びその製造方法
EP3855148B1 (en) 2018-10-23 2025-07-16 Minebea Mitsumi Inc. Accelerator pedal and steering apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876560A (en) * 1972-05-15 1975-04-08 Engelhard Min & Chem Thick film resistor material of ruthenium or iridium, gold or platinum and rhodium
US4071838A (en) * 1976-02-09 1978-01-31 Diax Corporation Solid state force transducer and method of making same
US4311980A (en) * 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
DE3113745A1 (de) * 1981-04-04 1982-10-21 Robert Bosch Gmbh, 7000 Stuttgart Duennschicht-dehnungsmessstreifen und verfahren zu seiner herstellung
JPS58142206A (ja) * 1982-02-18 1983-08-24 Tokyo Electric Co Ltd 歪センサ
US4462018A (en) * 1982-11-05 1984-07-24 Gulton Industries, Inc. Semiconductor strain gauge with integral compensation resistors
US4695504A (en) * 1985-06-21 1987-09-22 Matsushita Electric Industrial Co., Ltd. Thick film resistor composition
DE3522427A1 (de) * 1985-06-22 1986-02-20 Helmut Dipl Ing Fischer Titanoxinitridschicht fuer sensoranwendungen
US4771639A (en) * 1987-09-02 1988-09-20 Yokogawa Electric Corporation Semiconductor pressure sensor

Also Published As

Publication number Publication date
DE3817905A1 (de) 1988-12-08
DE3817905C2 (enExample) 1992-11-26
US4894635A (en) 1990-01-16
JPS63293432A (ja) 1988-11-30

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