JP6410105B2 - 圧力センサ及びその製造方法 - Google Patents
圧力センサ及びその製造方法 Download PDFInfo
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- JP6410105B2 JP6410105B2 JP2015185686A JP2015185686A JP6410105B2 JP 6410105 B2 JP6410105 B2 JP 6410105B2 JP 2015185686 A JP2015185686 A JP 2015185686A JP 2015185686 A JP2015185686 A JP 2015185686A JP 6410105 B2 JP6410105 B2 JP 6410105B2
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- Prior art keywords
- sensor
- resistor
- resistors
- pressure sensor
- printing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
- G01L7/082—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type construction or mounting of diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/01—Control of temperature without auxiliary power
- G05D23/12—Control of temperature without auxiliary power with sensing element responsive to pressure or volume changes in a confined fluid
- G05D23/121—Control of temperature without auxiliary power with sensing element responsive to pressure or volume changes in a confined fluid characterised by the sensing element
- G05D23/122—Control of temperature without auxiliary power with sensing element responsive to pressure or volume changes in a confined fluid characterised by the sensing element using a plurality of sensing elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Ceramic Engineering (AREA)
- Automation & Control Theory (AREA)
- Measuring Fluid Pressure (AREA)
Description
ダイヤフラム部には、ルテニウム系の厚膜抵抗ペースト材を焼成する厚膜印刷によって印刷された複数の抵抗体が互いに所定間隔離間して一直線状に設けられると共に、抵抗体を覆う第1及び第2の保護膜を備え、抵抗体の装着されるセンサの端面には、ダイヤフラム部の径方向外側となる位置に凸部が設けられ、凸部が抵抗体と同一材料且つ同一高さで形成されることを特徴とする。
センサに対して表面処理を施した後、センサの端面に対して導電性ペースト材を用いて配線を厚膜印刷によって印刷して焼成させる工程と、
ルテニウム系の厚膜抵抗ペースト材をスクリーンマスクに対して掻くことで、厚膜抵抗ペースト材を掻く方向と直交方向に複数の抵抗体を厚膜印刷によって同時に一直線状に印刷して焼成させる工程と、
を有することを特徴とする。
14…ボディ 16…ホルダ
18…センサ 38…ベース体
40a〜40d…抵抗体 42…配線
44…電極 46…第1保護膜
48…第2保護膜 50…凸部
56…ダイヤフラム部
Claims (5)
- 圧力流体の導入される流路を有したボディと、該ボディの端部に設けられ前記流路に臨む薄膜状のダイヤフラム部を有したセラミック製のセンサとを備えた圧力センサにおいて、
前記ダイヤフラム部には、ルテニウム系の厚膜抵抗ペースト材を焼成する厚膜印刷によって印刷された複数の抵抗体が互いに所定間隔離間して一直線状に設けられると共に、前記抵抗体を覆う第1及び第2の保護膜を備え、前記抵抗体の装着される前記センサの端面には、前記ダイヤフラム部の径方向外側となる位置に凸部が設けられ、前記凸部が前記抵抗体と同一材料且つ同一高さで形成されることを特徴とする圧力センサ。 - 請求項1記載の圧力センサにおいて、
前記抵抗体は、少なくとも一列以上設けられることを特徴とする圧力センサ。 - 請求項1又は2記載の圧力センサにおいて、
前記第1の保護膜は、低融点ガラスを印刷して焼成することで前記抵抗体を覆うように形成され、前記第2の保護膜が、前記第1の保護膜を覆うように有機材料を印刷して焼成することで形成されることを特徴とする圧力センサ。 - セラミック製のセンサを有した圧力センサを製造する製造方法において、
前記センサに対して表面処理を施した後、該センサの端面に対して導電性ペースト材を用いて配線を厚膜印刷によって印刷して焼成させる工程と、
ルテニウム系の厚膜抵抗ペースト材をスクリーンマスクに対して掻くことで、該厚膜抵抗ペースト材を掻く方向と直交方向に複数の抵抗体を厚膜印刷によって同時に一直線状に印刷して焼成させる工程と、
を有することを特徴とする圧力センサの製造方法。 - 請求項4記載の製造方法において、
前記抵抗体を低融点ガラスからなる第1の保護膜で覆う工程と、
前記抵抗体の抵抗値が調整された後に前記第1の保護膜を有機材料からなる第2の保護膜で覆う工程と、
を有することを特徴とする圧力センサの製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015185686A JP6410105B2 (ja) | 2015-09-18 | 2015-09-18 | 圧力センサ及びその製造方法 |
US15/179,232 US10048147B2 (en) | 2015-09-18 | 2016-06-10 | Pressure sensor including a thin-film diaphragm provided with plural resistive bodies printed in a straight line and manufacturing method therefor |
DE102016111623.8A DE102016111623A1 (de) | 2015-09-18 | 2016-06-24 | Drucksensor und Herstellverfahren hierfür |
TW105120153A TWI664406B (zh) | 2015-09-18 | 2016-06-27 | 壓力感測器及其製造方法 |
KR1020160082630A KR102488245B1 (ko) | 2015-09-18 | 2016-06-30 | 압력센서 및 그 제조 방법 |
CN201610506057.8A CN106546373B (zh) | 2015-09-18 | 2016-06-30 | 压力传感器及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015185686A JP6410105B2 (ja) | 2015-09-18 | 2015-09-18 | 圧力センサ及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017058340A JP2017058340A (ja) | 2017-03-23 |
JP6410105B2 true JP6410105B2 (ja) | 2018-10-24 |
Family
ID=58224775
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Country Status (6)
Country | Link |
---|---|
US (1) | US10048147B2 (ja) |
JP (1) | JP6410105B2 (ja) |
KR (1) | KR102488245B1 (ja) |
CN (1) | CN106546373B (ja) |
DE (1) | DE102016111623A1 (ja) |
TW (1) | TWI664406B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6340734B2 (ja) * | 2015-09-18 | 2018-06-13 | Smc株式会社 | 圧力センサ |
JP6410105B2 (ja) | 2015-09-18 | 2018-10-24 | Smc株式会社 | 圧力センサ及びその製造方法 |
DE102016218211A1 (de) * | 2016-09-22 | 2018-03-22 | Robert Bosch Gmbh | Drucksensor zur Erfassung eines Drucks eines fluiden Mediums in einem Messraum |
IT201700103447A1 (it) * | 2017-09-15 | 2019-03-15 | Kolektor Microtel S P A | Sensore di pressione ceramico |
Family Cites Families (27)
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JPS60152949U (ja) * | 1984-03-21 | 1985-10-11 | 株式会社東海理化電機製作所 | セラミツク圧力センサ |
JPH041472Y2 (ja) * | 1984-11-30 | 1992-01-20 | ||
JPH0731091B2 (ja) | 1987-05-27 | 1995-04-10 | 日本碍子株式会社 | 歪検出器 |
JPH0319940U (ja) | 1989-07-07 | 1991-02-27 | ||
JPH04221729A (ja) * | 1990-12-25 | 1992-08-12 | Kansei Corp | 圧力センサの圧力検出素子 |
DE4111149A1 (de) * | 1991-04-06 | 1992-10-08 | Bosch Gmbh Robert | Drucksensor |
JPH0663895B2 (ja) * | 1991-10-23 | 1994-08-22 | 株式会社東海理化電機製作所 | セラミック圧力センサ及びその製造方法 |
CN1108516C (zh) * | 1998-01-19 | 2003-05-14 | 合肥天神电器有限责任公司 | 陶瓷厚膜电阻压力变送器 |
JP2000292283A (ja) * | 1999-04-13 | 2000-10-20 | Matsushita Electric Ind Co Ltd | 歪検出装置 |
US6568276B1 (en) * | 2000-08-04 | 2003-05-27 | Measurement Specialties, Inc. | Strain gauge based sensor with improved linearity |
US6625029B2 (en) | 2000-11-06 | 2003-09-23 | Skg Italiana Spa | Sensor unit |
JP3691821B2 (ja) * | 2001-02-16 | 2005-09-07 | 箕輪興亜株式会社 | 応力センサ |
JP3969228B2 (ja) * | 2002-07-19 | 2007-09-05 | 松下電工株式会社 | 機械的変形量検出センサ及びそれを用いた加速度センサ、圧力センサ |
US6945118B2 (en) * | 2004-01-13 | 2005-09-20 | Honeywell International Inc. | Ceramic on metal pressure transducer |
US7430920B2 (en) * | 2005-12-16 | 2008-10-07 | Hitachi, Ltd. | Apparatus for measuring a mechanical quantity |
US20060189926A1 (en) * | 2005-02-14 | 2006-08-24 | Hall W D | Apparatus and methods for analyzing body fluid samples |
JP2009085931A (ja) | 2007-10-03 | 2009-04-23 | Valcom:Kk | 圧力センサ |
DE102008051400A1 (de) | 2008-10-11 | 2010-06-17 | Metallux Ag | Drucksensor |
KR101232613B1 (ko) * | 2011-04-22 | 2013-02-15 | 대양전기공업 주식회사 | 금속 다이아프램을 구비한 후막형 압력측정센서 및 상기 압력측정센서의 제조방법 |
JP5594541B2 (ja) * | 2012-02-09 | 2014-09-24 | Smc株式会社 | 圧力検出器 |
ITMI20120456A1 (it) | 2012-03-23 | 2013-09-24 | Microtel Tecnologie Elettroniche S P A | Sensore di pressione ceramico e relativo metodo di produzione, e trasduttore che incorpora un sensore di pressione ceramico |
JP5454628B2 (ja) * | 2012-06-29 | 2014-03-26 | 株式会社デンソー | 圧力センサ |
FR3007520A1 (fr) * | 2013-06-25 | 2014-12-26 | St Microelectronics Crolles 2 | Procede de determination d'un champ de contraintes tridimensionnelles d'un objet, en particulier une structure integree, et systeme correspondant |
JP6196557B2 (ja) * | 2014-01-20 | 2017-09-13 | 株式会社東芝 | 圧力センサ、マイクロフォン、加速度センサ及び圧力センサの製造方法 |
JP6340734B2 (ja) * | 2015-09-18 | 2018-06-13 | Smc株式会社 | 圧力センサ |
JP6410105B2 (ja) | 2015-09-18 | 2018-10-24 | Smc株式会社 | 圧力センサ及びその製造方法 |
IT201600081649A1 (it) | 2016-08-03 | 2018-02-03 | Kolektor Microtel S P A | Sensore di pressione piezoresistivo munito di resistore di calibrazione dell’offset |
-
2015
- 2015-09-18 JP JP2015185686A patent/JP6410105B2/ja active Active
-
2016
- 2016-06-10 US US15/179,232 patent/US10048147B2/en active Active
- 2016-06-24 DE DE102016111623.8A patent/DE102016111623A1/de active Pending
- 2016-06-27 TW TW105120153A patent/TWI664406B/zh active
- 2016-06-30 KR KR1020160082630A patent/KR102488245B1/ko active IP Right Grant
- 2016-06-30 CN CN201610506057.8A patent/CN106546373B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
US20170082512A1 (en) | 2017-03-23 |
CN106546373B (zh) | 2020-03-10 |
JP2017058340A (ja) | 2017-03-23 |
TWI664406B (zh) | 2019-07-01 |
KR20170034301A (ko) | 2017-03-28 |
CN106546373A (zh) | 2017-03-29 |
KR102488245B1 (ko) | 2023-01-16 |
DE102016111623A1 (de) | 2017-03-23 |
TW201712310A (zh) | 2017-04-01 |
US10048147B2 (en) | 2018-08-14 |
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