JP5594541B2 - 圧力検出器 - Google Patents
圧力検出器 Download PDFInfo
- Publication number
- JP5594541B2 JP5594541B2 JP2012025755A JP2012025755A JP5594541B2 JP 5594541 B2 JP5594541 B2 JP 5594541B2 JP 2012025755 A JP2012025755 A JP 2012025755A JP 2012025755 A JP2012025755 A JP 2012025755A JP 5594541 B2 JP5594541 B2 JP 5594541B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- fluid
- hole
- sensor
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0023—Fluidic connecting means for flowthrough systems having a flexible pressure transmitting element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
Description
18…圧力センサ 20…蓋部材
28…流路 30…貫通孔
32…棒状部材 34…センサ室
36…本体部 38…頭部
40…シール装着部 42、122…シール部材
44…ベース部 46…外縁部
48、124…スカート部 60…センサ部
102…圧力伝達体 104…棒状部
106…シール部
Claims (3)
- 流体が流通する流路を有したボディと、該ボディに設けられ圧力センサの配置されるセンサ室と、前記流路から前記センサ室まで延在した貫通孔とを備えた圧力検出器において、
前記貫通孔には、軸方向に沿って変位自在に設けられ、前記流体の圧力を前記圧力センサに対して伝達可能な圧力伝達体を備え、前記圧力伝達体の一端部が、前記貫通孔における前記流路側の端部まで延在し、前記流体に対して常に露出し、一方、前記圧力伝達体の他端部が前記圧力センサに対して直接当接すると共に、前記貫通孔と前記圧力センサの間には、前記センサ室と前記貫通孔との間の流体の流通を遮断するシール部材を備え、前記シール部材は、該シール部材の外周部及び前記ボディに臨む側面の少なくとも一部において、外方に向かって突出する環状突起部を有し、前記環状突起部が、前記シール部材の外周部において前記ボディと当接し、前記シール部材の内周部において前記ボディ及び前記圧力伝達体にそれぞれ当接することを特徴とする圧力検出器。 - 請求項1記載の圧力検出器において、
前記シール部材は、中央部に前記圧力伝達体の挿入される孔部を有することを特徴とする圧力検出器。 - 請求項1又は2記載の圧力検出器において、
前記圧力伝達体の他端部は、前記圧力センサ側に向かって凸状に膨出した曲面状に形成されることを特徴とする圧力検出器。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012025755A JP5594541B2 (ja) | 2012-02-09 | 2012-02-09 | 圧力検出器 |
US13/741,684 US9164008B2 (en) | 2012-02-09 | 2013-01-15 | Pressure detector |
TW102102595A TWI519771B (zh) | 2012-02-09 | 2013-01-24 | 壓力檢測器 |
DE102013100889.5A DE102013100889B8 (de) | 2012-02-09 | 2013-01-29 | Druckdetektor |
CN201310046333.3A CN103245456B (zh) | 2012-02-09 | 2013-02-05 | 压力检测器 |
KR1020130013215A KR101456840B1 (ko) | 2012-02-09 | 2013-02-06 | 압력 검출기 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012025755A JP5594541B2 (ja) | 2012-02-09 | 2012-02-09 | 圧力検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013160747A JP2013160747A (ja) | 2013-08-19 |
JP5594541B2 true JP5594541B2 (ja) | 2014-09-24 |
Family
ID=48868413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012025755A Active JP5594541B2 (ja) | 2012-02-09 | 2012-02-09 | 圧力検出器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9164008B2 (ja) |
JP (1) | JP5594541B2 (ja) |
KR (1) | KR101456840B1 (ja) |
CN (1) | CN103245456B (ja) |
DE (1) | DE102013100889B8 (ja) |
TW (1) | TWI519771B (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101483769B1 (ko) * | 2014-04-01 | 2015-01-16 | 한국단자공업 주식회사 | 압력센서 |
DE102014221067A1 (de) * | 2014-10-16 | 2016-04-21 | Robert Bosch Gmbh | Drucksensor zur Erfassung eines Drucks eines fluiden Mediums |
JP6993626B2 (ja) * | 2015-04-10 | 2022-01-13 | タカラベルモント株式会社 | 炭酸水生成装置 |
KR101740014B1 (ko) * | 2015-06-15 | 2017-05-26 | 주식회사 아이티엠반도체 | 압력센서장치 및 그 제조방법 |
JP6410105B2 (ja) * | 2015-09-18 | 2018-10-24 | Smc株式会社 | 圧力センサ及びその製造方法 |
CN105444942B (zh) * | 2015-12-22 | 2018-05-22 | 湖北中南勘察基础工程有限公司 | 一种注浆压力计底座装置 |
CN106706200B (zh) * | 2016-11-16 | 2019-02-22 | 罗子懿 | 一种压力检测器的制造方法 |
JP6850152B2 (ja) * | 2017-02-22 | 2021-03-31 | サーパス工業株式会社 | 圧力検出装置 |
JP6857095B2 (ja) * | 2017-07-05 | 2021-04-14 | サーパス工業株式会社 | 圧力検出装置 |
CN109199395A (zh) * | 2018-07-20 | 2019-01-15 | 渝新智能科技(上海)有限公司 | 一种睡眠状态识别方法、装置及设备 |
CA3160952A1 (en) | 2019-11-12 | 2021-05-20 | Fresenius Medical Care Deutschland Gmbh | Blood treatment systems |
CN114728159A (zh) | 2019-11-12 | 2022-07-08 | 费森尤斯医疗护理德国有限责任公司 | 血液治疗系统 |
CN114746129A (zh) | 2019-11-12 | 2022-07-12 | 费森尤斯医疗护理德国有限责任公司 | 血液治疗系统 |
WO2021094139A1 (en) | 2019-11-12 | 2021-05-20 | Fresenius Medical Care Deutschland Gmbh | Blood treatment systems |
KR20230035405A (ko) * | 2020-10-15 | 2023-03-13 | 가부시키가이샤 후지킨 | 압력 센서용의 커버 부품 및 이것을 구비하는 압력 센서 장치 |
US20220178029A1 (en) * | 2020-12-03 | 2022-06-09 | Tokyo Electron Limited | Deposition apparatus and deposition method |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7928697U1 (de) * | 1979-10-09 | 1980-02-21 | Ritzinger, Klaus, Dipl.-Ing. | Stoesselbetaetigtes druckmessgeraet |
JPS60135639U (ja) * | 1984-02-20 | 1985-09-09 | 日本特殊陶業株式会社 | 圧電センサ− |
JPH02236431A (ja) * | 1989-03-10 | 1990-09-19 | Matsushita Electric Ind Co Ltd | 圧電型圧力センサ |
US5043841A (en) | 1989-06-13 | 1991-08-27 | Bishop Robert P | High pressure transducer package |
DE4013403C2 (de) * | 1990-04-26 | 1994-06-30 | Infurex Ag Cham | Vorrichtung zur Erkennung der Innendruckverhältnisse in flexiblen Leitungen |
JPH06265430A (ja) * | 1993-03-11 | 1994-09-22 | Nissan Motor Co Ltd | 筒内圧センサ |
US5542300A (en) | 1994-01-24 | 1996-08-06 | Setra Systems, Inc. | Low cost, center-mounted capacitive pressure sensor |
JP3141225B2 (ja) * | 1994-12-26 | 2001-03-05 | 三菱電機株式会社 | 圧力検出装置とその取付け方法 |
US5693887A (en) | 1995-10-03 | 1997-12-02 | Nt International, Inc. | Pressure sensor module having non-contaminating body and isolation member |
US5869766A (en) | 1995-10-03 | 1999-02-09 | Nt International, Inc. | Non-contaminating pressure transducer module |
JPH09166512A (ja) | 1995-12-15 | 1997-06-24 | T & T:Kk | 流体圧力センサー |
US5993395A (en) * | 1996-04-18 | 1999-11-30 | Sunscope International Inc. | Pressure transducer apparatus with disposable dome |
US5834652A (en) | 1996-08-15 | 1998-11-10 | Mitsubishi Denki Kabushiki Kaisha | Pressure sensing device with elastic sealing member and method of easy installation |
JP3494594B2 (ja) * | 1999-08-05 | 2004-02-09 | 忠弘 大見 | 圧力検出器の取付け構造 |
JP2002156302A (ja) | 2000-11-17 | 2002-05-31 | Surpass Kogyo Kk | 圧力センサー |
JP4234024B2 (ja) | 2004-01-23 | 2009-03-04 | サーパス工業株式会社 | インライン型圧力センサー |
JP4525297B2 (ja) * | 2004-10-28 | 2010-08-18 | 株式会社デンソー | 圧力検出装置 |
ITTO20080484A1 (it) * | 2008-06-19 | 2009-12-20 | Eltek Spa | Dispositivo sensore di pressione |
EP2607875B1 (de) * | 2011-12-20 | 2018-02-14 | ViscoTec Pumpen- und Dosiertechnik GmbH | Durchströmter Drucksensor und Fördereinrichtung mit einem durchströmten Drucksensor |
-
2012
- 2012-02-09 JP JP2012025755A patent/JP5594541B2/ja active Active
-
2013
- 2013-01-15 US US13/741,684 patent/US9164008B2/en not_active Expired - Fee Related
- 2013-01-24 TW TW102102595A patent/TWI519771B/zh active
- 2013-01-29 DE DE102013100889.5A patent/DE102013100889B8/de not_active Expired - Fee Related
- 2013-02-05 CN CN201310046333.3A patent/CN103245456B/zh not_active Expired - Fee Related
- 2013-02-06 KR KR1020130013215A patent/KR101456840B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US20130205907A1 (en) | 2013-08-15 |
DE102013100889B8 (de) | 2017-07-27 |
KR20130092464A (ko) | 2013-08-20 |
CN103245456B (zh) | 2016-04-06 |
US9164008B2 (en) | 2015-10-20 |
DE102013100889A1 (de) | 2013-08-14 |
CN103245456A (zh) | 2013-08-14 |
KR101456840B1 (ko) | 2014-11-03 |
DE102013100889B4 (de) | 2017-05-04 |
TW201337227A (zh) | 2013-09-16 |
TWI519771B (zh) | 2016-02-01 |
JP2013160747A (ja) | 2013-08-19 |
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