JP2013160747A - 圧力検出器 - Google Patents
圧力検出器 Download PDFInfo
- Publication number
- JP2013160747A JP2013160747A JP2012025755A JP2012025755A JP2013160747A JP 2013160747 A JP2013160747 A JP 2013160747A JP 2012025755 A JP2012025755 A JP 2012025755A JP 2012025755 A JP2012025755 A JP 2012025755A JP 2013160747 A JP2013160747 A JP 2013160747A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensor
- hole
- fluid
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0023—Fluidic connecting means for flowthrough systems having a flexible pressure transmitting element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
【解決手段】圧力検出器10を構成するボディ16には、圧力流体の流通する流路28の略中央部から上方に向かって貫通孔30が形成され、前記貫通孔30が、圧力センサ18の設けられるセンサ室34と連通すると共に、その内部には棒状部材32が変位自在に設けられる。そして、流路28に露呈した棒状部材32の端部が圧力流体によって押圧され上方へと変位し、前記棒状部材32の頭部38によって圧力センサ18を押圧することで圧力が検出される。
【選択図】図1
Description
18…圧力センサ 20…蓋部材
28…流路 30…貫通孔
32…棒状部材 34…センサ室
36…本体部 38…頭部
40…シール装着部 42、122…シール部材
44…ベース部 46…外縁部
48、124…スカート部 60…センサ部
102…圧力伝達体 104…棒状部
106…シール部
Claims (7)
- 流体が流通する流路を有したボディと、該ボディに設けられ圧力センサの配置されるセンサ室と、前記流路から前記センサ室まで延在した貫通孔とを備えた圧力検出器において、
前記貫通孔には、軸方向に沿って変位自在に設けられ、前記流体の圧力を前記圧力センサに対して伝達可能な圧力伝達体を備え、前記圧力伝達体の一端部が、前記貫通孔における前記流路側の端部まで延在すると共に、前記一端部が前記流体に対して常に露出していることを特徴とする圧力検出器。 - 請求項1記載の圧力検出器において、
前記貫通孔と前記圧力センサの間には、前記センサ室と前記貫通孔との間の流体の流通を遮断するシール部材を備えることを特徴とする圧力検出器。 - 請求項2記載の圧力検出器において、
前記シール部材は、中央部に前記圧力伝達体の挿入される孔部を有することを特徴とする圧力検出器。 - 請求項3記載の圧力検出器において、
前記圧力伝達体の他端部は、前記圧力センサに対して当接することを特徴とする圧力検出器。 - 請求項2記載の圧力検出器において、
前記シール部材は、前記圧力伝達体と一体的に形成されることを特徴とする圧力検出器。 - 請求項2記載の圧力検出器において、
前記圧力伝達体は、前記シール部材に対して前記貫通孔側に設けられ、前記圧力を前記シール部材を介して前記圧力センサへと伝達することを特徴とする圧力検出器。 - 請求項2〜6のいずれかに記載の圧力検出器において、
前記シール部材は、該シール部材の外周部及び前記ボディに臨む側面の少なくとも一部において、外方に向かって突出する環状突起部を備えることを特徴とする圧力検出器。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012025755A JP5594541B2 (ja) | 2012-02-09 | 2012-02-09 | 圧力検出器 |
US13/741,684 US9164008B2 (en) | 2012-02-09 | 2013-01-15 | Pressure detector |
TW102102595A TWI519771B (zh) | 2012-02-09 | 2013-01-24 | 壓力檢測器 |
DE102013100889.5A DE102013100889B8 (de) | 2012-02-09 | 2013-01-29 | Druckdetektor |
CN201310046333.3A CN103245456B (zh) | 2012-02-09 | 2013-02-05 | 压力检测器 |
KR1020130013215A KR101456840B1 (ko) | 2012-02-09 | 2013-02-06 | 압력 검출기 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012025755A JP5594541B2 (ja) | 2012-02-09 | 2012-02-09 | 圧力検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013160747A true JP2013160747A (ja) | 2013-08-19 |
JP5594541B2 JP5594541B2 (ja) | 2014-09-24 |
Family
ID=48868413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012025755A Active JP5594541B2 (ja) | 2012-02-09 | 2012-02-09 | 圧力検出器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9164008B2 (ja) |
JP (1) | JP5594541B2 (ja) |
KR (1) | KR101456840B1 (ja) |
CN (1) | CN103245456B (ja) |
DE (1) | DE102013100889B8 (ja) |
TW (1) | TWI519771B (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101483769B1 (ko) * | 2014-04-01 | 2015-01-16 | 한국단자공업 주식회사 | 압력센서 |
DE102014221067A1 (de) * | 2014-10-16 | 2016-04-21 | Robert Bosch Gmbh | Drucksensor zur Erfassung eines Drucks eines fluiden Mediums |
JP6993626B2 (ja) * | 2015-04-10 | 2022-01-13 | タカラベルモント株式会社 | 炭酸水生成装置 |
KR101740014B1 (ko) | 2015-06-15 | 2017-05-26 | 주식회사 아이티엠반도체 | 압력센서장치 및 그 제조방법 |
JP6410105B2 (ja) * | 2015-09-18 | 2018-10-24 | Smc株式会社 | 圧力センサ及びその製造方法 |
CN105444942B (zh) * | 2015-12-22 | 2018-05-22 | 湖北中南勘察基础工程有限公司 | 一种注浆压力计底座装置 |
CN106706200B (zh) * | 2016-11-16 | 2019-02-22 | 罗子懿 | 一种压力检测器的制造方法 |
JP6850152B2 (ja) * | 2017-02-22 | 2021-03-31 | サーパス工業株式会社 | 圧力検出装置 |
JP6857095B2 (ja) * | 2017-07-05 | 2021-04-14 | サーパス工業株式会社 | 圧力検出装置 |
CN109199395A (zh) * | 2018-07-20 | 2019-01-15 | 渝新智能科技(上海)有限公司 | 一种睡眠状态识别方法、装置及设备 |
WO2021094140A1 (en) | 2019-11-12 | 2021-05-20 | Fresenius Medical Care Deutschland Gmbh | Blood treatment systems |
CN114728116A (zh) | 2019-11-12 | 2022-07-08 | 费森尤斯医疗护理德国有限责任公司 | 血液治疗系统 |
EP4058088A1 (en) | 2019-11-12 | 2022-09-21 | Fresenius Medical Care Deutschland GmbH | Blood treatment systems |
EP4058093A1 (en) | 2019-11-12 | 2022-09-21 | Fresenius Medical Care Deutschland GmbH | Blood treatment systems |
JP7455432B2 (ja) * | 2020-10-15 | 2024-03-26 | 株式会社フジキン | 圧力センサ用のカバー部品およびこれを備える圧力センサ装置 |
US20220178029A1 (en) * | 2020-12-03 | 2022-06-09 | Tokyo Electron Limited | Deposition apparatus and deposition method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60135639U (ja) * | 1984-02-20 | 1985-09-09 | 日本特殊陶業株式会社 | 圧電センサ− |
JPH02236431A (ja) * | 1989-03-10 | 1990-09-19 | Matsushita Electric Ind Co Ltd | 圧電型圧力センサ |
JPH0394132A (ja) * | 1989-06-13 | 1991-04-18 | Texas Instr Inc <Ti> | 圧力トランスデューサ外装体 |
JPH08178785A (ja) * | 1994-12-26 | 1996-07-12 | Mitsubishi Electric Corp | 圧力検出装置とその取付け方法 |
JP2006125982A (ja) * | 2004-10-28 | 2006-05-18 | Denso Corp | 圧力検出装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7928697U1 (de) * | 1979-10-09 | 1980-02-21 | Ritzinger, Klaus, Dipl.-Ing. | Stoesselbetaetigtes druckmessgeraet |
DE4013403C2 (de) * | 1990-04-26 | 1994-06-30 | Infurex Ag Cham | Vorrichtung zur Erkennung der Innendruckverhältnisse in flexiblen Leitungen |
JPH06265430A (ja) * | 1993-03-11 | 1994-09-22 | Nissan Motor Co Ltd | 筒内圧センサ |
US5542300A (en) | 1994-01-24 | 1996-08-06 | Setra Systems, Inc. | Low cost, center-mounted capacitive pressure sensor |
US5693887A (en) | 1995-10-03 | 1997-12-02 | Nt International, Inc. | Pressure sensor module having non-contaminating body and isolation member |
US5869766A (en) | 1995-10-03 | 1999-02-09 | Nt International, Inc. | Non-contaminating pressure transducer module |
JPH09166512A (ja) | 1995-12-15 | 1997-06-24 | T & T:Kk | 流体圧力センサー |
US5993395A (en) * | 1996-04-18 | 1999-11-30 | Sunscope International Inc. | Pressure transducer apparatus with disposable dome |
US5834652A (en) | 1996-08-15 | 1998-11-10 | Mitsubishi Denki Kabushiki Kaisha | Pressure sensing device with elastic sealing member and method of easy installation |
JP3494594B2 (ja) * | 1999-08-05 | 2004-02-09 | 忠弘 大見 | 圧力検出器の取付け構造 |
JP2002156302A (ja) | 2000-11-17 | 2002-05-31 | Surpass Kogyo Kk | 圧力センサー |
JP4234024B2 (ja) | 2004-01-23 | 2009-03-04 | サーパス工業株式会社 | インライン型圧力センサー |
ITTO20080484A1 (it) * | 2008-06-19 | 2009-12-20 | Eltek Spa | Dispositivo sensore di pressione |
EP2607875B1 (de) * | 2011-12-20 | 2018-02-14 | ViscoTec Pumpen- und Dosiertechnik GmbH | Durchströmter Drucksensor und Fördereinrichtung mit einem durchströmten Drucksensor |
-
2012
- 2012-02-09 JP JP2012025755A patent/JP5594541B2/ja active Active
-
2013
- 2013-01-15 US US13/741,684 patent/US9164008B2/en not_active Expired - Fee Related
- 2013-01-24 TW TW102102595A patent/TWI519771B/zh active
- 2013-01-29 DE DE102013100889.5A patent/DE102013100889B8/de not_active Expired - Fee Related
- 2013-02-05 CN CN201310046333.3A patent/CN103245456B/zh not_active Expired - Fee Related
- 2013-02-06 KR KR1020130013215A patent/KR101456840B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60135639U (ja) * | 1984-02-20 | 1985-09-09 | 日本特殊陶業株式会社 | 圧電センサ− |
JPH02236431A (ja) * | 1989-03-10 | 1990-09-19 | Matsushita Electric Ind Co Ltd | 圧電型圧力センサ |
JPH0394132A (ja) * | 1989-06-13 | 1991-04-18 | Texas Instr Inc <Ti> | 圧力トランスデューサ外装体 |
JPH08178785A (ja) * | 1994-12-26 | 1996-07-12 | Mitsubishi Electric Corp | 圧力検出装置とその取付け方法 |
JP2006125982A (ja) * | 2004-10-28 | 2006-05-18 | Denso Corp | 圧力検出装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103245456B (zh) | 2016-04-06 |
KR20130092464A (ko) | 2013-08-20 |
TW201337227A (zh) | 2013-09-16 |
CN103245456A (zh) | 2013-08-14 |
US20130205907A1 (en) | 2013-08-15 |
DE102013100889B4 (de) | 2017-05-04 |
KR101456840B1 (ko) | 2014-11-03 |
TWI519771B (zh) | 2016-02-01 |
DE102013100889A1 (de) | 2013-08-14 |
US9164008B2 (en) | 2015-10-20 |
DE102013100889B8 (de) | 2017-07-27 |
JP5594541B2 (ja) | 2014-09-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5594541B2 (ja) | 圧力検出器 | |
JP4700448B2 (ja) | 差圧式流量計 | |
CN101509817B (zh) | 流体压差测量装置 | |
US5693887A (en) | Pressure sensor module having non-contaminating body and isolation member | |
KR100389188B1 (ko) | 비오염식 압력변환기 모듈 | |
CN105074408B (zh) | 压力检测器的安装结构 | |
KR101766144B1 (ko) | 온도센서 일체형 압력센서 | |
KR102612893B1 (ko) | 압력 검출 장치 | |
KR102656464B1 (ko) | 멤브레인 절연형 겔 충전식 힘 센서 | |
CN112292586A (zh) | 超声波传感器装置 | |
JP6632902B2 (ja) | 圧力検出装置 | |
JP6850152B2 (ja) | 圧力検出装置 | |
KR101578117B1 (ko) | 기밀성이 향상된 온도소자 일체형 압력센서장치 | |
KR20120011011A (ko) | 유량 측정 장치 및 유체 압력 측정 장치 | |
CN109791063B (zh) | 流量计 | |
JP2016205877A (ja) | 圧力検出器 | |
JP2005345300A (ja) | 圧力測定器 | |
US10788345B2 (en) | Thermal flowmeter | |
JP2009085931A (ja) | 圧力センサ | |
WO2022085497A1 (ja) | 圧力温度センサ | |
JP2021014995A (ja) | 熱式流量計 | |
US20240175775A1 (en) | Combination pressure and temperature sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20131016 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131022 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140415 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140616 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140701 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140723 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5594541 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |