JP7455432B2 - 圧力センサ用のカバー部品およびこれを備える圧力センサ装置 - Google Patents
圧力センサ用のカバー部品およびこれを備える圧力センサ装置 Download PDFInfo
- Publication number
- JP7455432B2 JP7455432B2 JP2022557288A JP2022557288A JP7455432B2 JP 7455432 B2 JP7455432 B2 JP 7455432B2 JP 2022557288 A JP2022557288 A JP 2022557288A JP 2022557288 A JP2022557288 A JP 2022557288A JP 7455432 B2 JP7455432 B2 JP 7455432B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- pressure
- lid member
- fixed
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229920002530 polyetherether ketone Polymers 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 28
- 238000011144 upstream manufacturing Methods 0.000 description 17
- 230000008016 vaporization Effects 0.000 description 15
- 238000009834 vaporization Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000012530 fluid Substances 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 239000000788 chromium alloy Substances 0.000 description 2
- OGSYQYXYGXIQFH-UHFFFAOYSA-N chromium molybdenum nickel Chemical compound [Cr].[Ni].[Mo] OGSYQYXYGXIQFH-UHFFFAOYSA-N 0.000 description 2
- 230000006355 external stress Effects 0.000 description 2
- 229910000856 hastalloy Inorganic materials 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0681—Protection against excessive heat
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Description
3 カバー部品
3a 穴開き部材
3b 蓋部材
3c ケーブル固定具
5 ボディ
7 ねじ
9a センサ孔
9b ケーブル孔
9b’ 切り欠き
10 圧力センサ装置
11 筒状部材
12 センサモジュール
12a ダイヤフラム
12b 圧力検出素子
12c リード線 (信号ケーブル)
13 ハーメチックカバー
14 カバー体
16 ガスケット
18 ボンネットナット
20 圧力式流量制御装置
22 コントロール弁
24 絞り部
26 流入圧力センサ
28 ストップバルブ
30 気化供給装置
100 ガス供給系
C1 受圧室
C2 真空室
F1 流路
Claims (3)
- 流路が形成されたボディの取り付け面に固定され、固定されたときに前記取り付け面から突出する突出部を有する圧力センサのためのカバー部品であって、
前記圧力センサの突出部の側面と対向する内周面を有する穴開き部材と、
前記穴開き部材に対して固定され、前記圧力センサの突出部を覆う蓋部材であって、前記穴開き部材の上面に載置され、前記穴開き部材にねじによって固定されている蓋部材と
を備え、
前記穴開き部材と前記蓋部材とは異なる材料から形成されており、前記穴開き部材の熱伝導率は前記蓋部材の熱伝導率よりも高く、前記穴開き部材はアルミニウムから形成され、前記蓋部材はポリエーテルエーテルケトンから形成され、前記穴開き部材の内周面はアルマイト処理されており、
前記蓋部材には、前記圧力センサが有するケーブルを通過させるための孔または切り欠きが形成されており、前記蓋部材から延びる前記ケーブルを保持するケーブル固定具が前記蓋部材の上面に固定されている、カバー部品。 - 前記ボディに取り付けられた請求項1に記載のカバー部品と、
前記ボディに取り付けられ請求項1に記載のカバー部品によって覆われた圧力センサと
を備える、圧力センサ装置。 - 前記圧力センサは、感圧部としてのダイヤフラムを含み前記ボディの流路と連通する受圧室を内側に有する有底筒状のセンサモジュールであって圧力検出素子が取り付けられたセンサモジュールと、前記ダイヤフラムによって前記受圧室と隔てられた真空室を包囲するハーメチックカバーとを有するダイヤフラム式の圧力センサである、請求項2に記載の圧力センサ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020173730 | 2020-10-15 | ||
JP2020173730 | 2020-10-15 | ||
PCT/JP2021/033812 WO2022080069A1 (ja) | 2020-10-15 | 2021-09-14 | 圧力センサ用のカバー部品およびこれを備える圧力センサ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2022080069A1 JPWO2022080069A1 (ja) | 2022-04-21 |
JP7455432B2 true JP7455432B2 (ja) | 2024-03-26 |
Family
ID=81209049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022557288A Active JP7455432B2 (ja) | 2020-10-15 | 2021-09-14 | 圧力センサ用のカバー部品およびこれを備える圧力センサ装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20230296464A1 (ja) |
JP (1) | JP7455432B2 (ja) |
KR (1) | KR20230035405A (ja) |
TW (1) | TWI800020B (ja) |
WO (1) | WO2022080069A1 (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000304637A (ja) | 1999-04-21 | 2000-11-02 | Nippon Seiki Co Ltd | 圧力検出器 |
US20090260445A1 (en) | 2008-03-28 | 2009-10-22 | Vega Grieshaber Kg | Protective hood with a housing for the protection of a measuring apparatus |
JP2012233778A (ja) | 2011-04-28 | 2012-11-29 | Fujitsu Component Ltd | 接触端子装置 |
US20120297886A1 (en) | 2009-10-14 | 2012-11-29 | Chul-Sub Lee | Vertical Pressure Sensor |
JP2016024033A (ja) | 2014-07-18 | 2016-02-08 | 株式会社フジクラ | 半導体圧力センサ及び半導体圧力センサ取付構造体 |
WO2020075600A1 (ja) | 2018-10-09 | 2020-04-16 | 株式会社フジキン | 圧力センサ |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2305030C3 (de) | 1973-02-02 | 1983-02-10 | Wäschle Maschinenfabrik GmbH, 7980 Ravensburg | Anlage zum pneumatischen Fördern von Schüttgütern |
US5115676A (en) * | 1990-01-10 | 1992-05-26 | Setra Systems, Inc. | Flush-mounted pressure sensor |
US5410916A (en) * | 1994-06-24 | 1995-05-02 | Honeywell Inc. | Flowthrough pressure sensor |
JP5594541B2 (ja) * | 2012-02-09 | 2014-09-24 | Smc株式会社 | 圧力検出器 |
JP6775997B2 (ja) * | 2016-05-13 | 2020-10-28 | 株式会社エンプラス | 電気部品用ソケット |
CN110914959A (zh) | 2017-07-25 | 2020-03-24 | 株式会社富士金 | 流体控制装置 |
-
2021
- 2021-09-14 KR KR1020237004684A patent/KR20230035405A/ko unknown
- 2021-09-14 US US18/040,917 patent/US20230296464A1/en active Pending
- 2021-09-14 WO PCT/JP2021/033812 patent/WO2022080069A1/ja active Application Filing
- 2021-09-14 JP JP2022557288A patent/JP7455432B2/ja active Active
- 2021-10-04 TW TW110136819A patent/TWI800020B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000304637A (ja) | 1999-04-21 | 2000-11-02 | Nippon Seiki Co Ltd | 圧力検出器 |
US20090260445A1 (en) | 2008-03-28 | 2009-10-22 | Vega Grieshaber Kg | Protective hood with a housing for the protection of a measuring apparatus |
US20120297886A1 (en) | 2009-10-14 | 2012-11-29 | Chul-Sub Lee | Vertical Pressure Sensor |
JP2012233778A (ja) | 2011-04-28 | 2012-11-29 | Fujitsu Component Ltd | 接触端子装置 |
JP2016024033A (ja) | 2014-07-18 | 2016-02-08 | 株式会社フジクラ | 半導体圧力センサ及び半導体圧力センサ取付構造体 |
WO2020075600A1 (ja) | 2018-10-09 | 2020-04-16 | 株式会社フジキン | 圧力センサ |
Also Published As
Publication number | Publication date |
---|---|
KR20230035405A (ko) | 2023-03-13 |
TWI800020B (zh) | 2023-04-21 |
JPWO2022080069A1 (ja) | 2022-04-21 |
TW202225652A (zh) | 2022-07-01 |
US20230296464A1 (en) | 2023-09-21 |
WO2022080069A1 (ja) | 2022-04-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11054052B2 (en) | Piezoelectric-element-driven valve and flow rate control device | |
US7428913B2 (en) | Valve assembly having articulating rigid seating surface | |
JP5118493B2 (ja) | 剛性な着座面を有する弁組立体 | |
US20200348704A1 (en) | Flow rate control device | |
US20190178389A1 (en) | Valve with built-in orifice, and pressure-type flow rate control device | |
KR102017300B1 (ko) | 압력 센서 | |
JPWO2017033423A1 (ja) | 圧電式リニアアクチュエータ、圧電駆動バルブ及び流量制御装置 | |
US10261522B2 (en) | Pressure-type flow rate control device | |
US20240160230A1 (en) | Flow rate control device | |
JP7455432B2 (ja) | 圧力センサ用のカバー部品およびこれを備える圧力センサ装置 | |
KR20140141417A (ko) | 가열기화 시스템 및 가열기화 방법 | |
US8528598B2 (en) | Flow splitter | |
JP7207761B2 (ja) | バルブ装置および流体制御装置 | |
JP2018092622A (ja) | 圧電駆動式バルブおよび流量制御装置 | |
JP4084534B2 (ja) | 樹脂製弁及びその組立構造 | |
JP2024053813A (ja) | 流量制御装置、気化供給装置および流量制御装置の製造方法 | |
US930640A (en) | Gas-regulator. | |
JP7370028B2 (ja) | 圧力センサ | |
JP7382054B2 (ja) | バルブ装置および流量制御装置 | |
US11869782B2 (en) | System and apparatus for a valve assembly | |
JP2021134909A (ja) | ソレノイドバルブ、流量制御装置、流体制御装置および半導体製造装置 | |
KR20230130027A (ko) | 벨로우즈 다이어프램 조립체 | |
JP2001014035A (ja) | 流量制御装置 | |
KR101177752B1 (ko) | 스톱퍼를 구비한 실린더 밸브 및 이를 이용한 실린더 밸브 시스템 | |
JP2020035291A (ja) | 流量制御装置、流量制御方法、流体制御装置、半導体製造装置および半導体製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20221021 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230821 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20231010 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20231025 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240112 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20240125 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240214 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240306 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7455432 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |