JPH0720914Y2 - 基板の表面処理装置 - Google Patents

基板の表面処理装置

Info

Publication number
JPH0720914Y2
JPH0720914Y2 JP1990058570U JP5857090U JPH0720914Y2 JP H0720914 Y2 JPH0720914 Y2 JP H0720914Y2 JP 1990058570 U JP1990058570 U JP 1990058570U JP 5857090 U JP5857090 U JP 5857090U JP H0720914 Y2 JPH0720914 Y2 JP H0720914Y2
Authority
JP
Japan
Prior art keywords
substrate
treatment
liquid
nozzle
processing liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990058570U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0418434U (US07534539-20090519-C00280.png
Inventor
幸造 吉田
次雄 中村
正雄 井手
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1990058570U priority Critical patent/JPH0720914Y2/ja
Publication of JPH0418434U publication Critical patent/JPH0418434U/ja
Application granted granted Critical
Publication of JPH0720914Y2 publication Critical patent/JPH0720914Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
JP1990058570U 1990-06-01 1990-06-01 基板の表面処理装置 Expired - Lifetime JPH0720914Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990058570U JPH0720914Y2 (ja) 1990-06-01 1990-06-01 基板の表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990058570U JPH0720914Y2 (ja) 1990-06-01 1990-06-01 基板の表面処理装置

Publications (2)

Publication Number Publication Date
JPH0418434U JPH0418434U (US07534539-20090519-C00280.png) 1992-02-17
JPH0720914Y2 true JPH0720914Y2 (ja) 1995-05-15

Family

ID=31584304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990058570U Expired - Lifetime JPH0720914Y2 (ja) 1990-06-01 1990-06-01 基板の表面処理装置

Country Status (1)

Country Link
JP (1) JPH0720914Y2 (US07534539-20090519-C00280.png)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0783167B2 (ja) * 1992-12-24 1995-09-06 東京化工機株式会社 電着装置
JP4602567B2 (ja) * 2000-12-15 2010-12-22 芝浦メカトロニクス株式会社 基板の洗浄装置
TWI226077B (en) * 2001-07-05 2005-01-01 Tokyo Electron Ltd Liquid processing apparatus and liquid processing method
WO2003100842A1 (fr) * 2002-05-23 2003-12-04 Sumitomo Precision Products Co., Ltd Dispositif de traitement de substrats equipe d'un mecanisme de transport

Also Published As

Publication number Publication date
JPH0418434U (US07534539-20090519-C00280.png) 1992-02-17

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