JPH069494Y2 - 板状物の洗浄装置 - Google Patents

板状物の洗浄装置

Info

Publication number
JPH069494Y2
JPH069494Y2 JP1987119651U JP11965187U JPH069494Y2 JP H069494 Y2 JPH069494 Y2 JP H069494Y2 JP 1987119651 U JP1987119651 U JP 1987119651U JP 11965187 U JP11965187 U JP 11965187U JP H069494 Y2 JPH069494 Y2 JP H069494Y2
Authority
JP
Japan
Prior art keywords
cleaning
plate
air
chemical
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987119651U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6424830U (enrdf_load_stackoverflow
Inventor
輝隆 佐原
征 山崎
Original Assignee
日立プラント建設株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立プラント建設株式会社 filed Critical 日立プラント建設株式会社
Priority to JP1987119651U priority Critical patent/JPH069494Y2/ja
Publication of JPS6424830U publication Critical patent/JPS6424830U/ja
Application granted granted Critical
Publication of JPH069494Y2 publication Critical patent/JPH069494Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1987119651U 1987-08-04 1987-08-04 板状物の洗浄装置 Expired - Lifetime JPH069494Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987119651U JPH069494Y2 (ja) 1987-08-04 1987-08-04 板状物の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987119651U JPH069494Y2 (ja) 1987-08-04 1987-08-04 板状物の洗浄装置

Publications (2)

Publication Number Publication Date
JPS6424830U JPS6424830U (enrdf_load_stackoverflow) 1989-02-10
JPH069494Y2 true JPH069494Y2 (ja) 1994-03-09

Family

ID=31365064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987119651U Expired - Lifetime JPH069494Y2 (ja) 1987-08-04 1987-08-04 板状物の洗浄装置

Country Status (1)

Country Link
JP (1) JPH069494Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587830A (ja) * 1981-07-08 1983-01-17 Hitachi Ltd 薄片状物品の洗浄方法及び装置

Also Published As

Publication number Publication date
JPS6424830U (enrdf_load_stackoverflow) 1989-02-10

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