JPS6234440Y2 - - Google Patents

Info

Publication number
JPS6234440Y2
JPS6234440Y2 JP1982045003U JP4500382U JPS6234440Y2 JP S6234440 Y2 JPS6234440 Y2 JP S6234440Y2 JP 1982045003 U JP1982045003 U JP 1982045003U JP 4500382 U JP4500382 U JP 4500382U JP S6234440 Y2 JPS6234440 Y2 JP S6234440Y2
Authority
JP
Japan
Prior art keywords
liquid
substrate
transport path
transport
conveyance path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982045003U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58147246U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4500382U priority Critical patent/JPS58147246U/ja
Publication of JPS58147246U publication Critical patent/JPS58147246U/ja
Application granted granted Critical
Publication of JPS6234440Y2 publication Critical patent/JPS6234440Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Pusher Or Impeller Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP4500382U 1982-03-30 1982-03-30 基板の液体搬送装置 Granted JPS58147246U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4500382U JPS58147246U (ja) 1982-03-30 1982-03-30 基板の液体搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4500382U JPS58147246U (ja) 1982-03-30 1982-03-30 基板の液体搬送装置

Publications (2)

Publication Number Publication Date
JPS58147246U JPS58147246U (ja) 1983-10-03
JPS6234440Y2 true JPS6234440Y2 (enrdf_load_stackoverflow) 1987-09-02

Family

ID=30056044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4500382U Granted JPS58147246U (ja) 1982-03-30 1982-03-30 基板の液体搬送装置

Country Status (1)

Country Link
JP (1) JPS58147246U (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079897B2 (ja) * 1988-05-17 1995-02-01 信越半導体株式会社 ウェーハ自動洗浄装置
JP2504916B2 (ja) * 1993-09-20 1996-06-05 株式会社芝浦製作所 基板洗浄装置
JP4510241B2 (ja) * 2000-06-30 2010-07-21 不二越機械工業株式会社 ウェーハの収納装置
JP4594241B2 (ja) * 2006-01-06 2010-12-08 東京エレクトロン株式会社 基板搬送装置、基板搬送方法及びコンピュータプログラム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285461A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Continuous treating apparatus for plate form objects
JPS5588888A (en) * 1978-12-27 1980-07-04 Hitachi Ltd Treating device

Also Published As

Publication number Publication date
JPS58147246U (ja) 1983-10-03

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