JPS58147246U - 基板の液体搬送装置 - Google Patents

基板の液体搬送装置

Info

Publication number
JPS58147246U
JPS58147246U JP4500382U JP4500382U JPS58147246U JP S58147246 U JPS58147246 U JP S58147246U JP 4500382 U JP4500382 U JP 4500382U JP 4500382 U JP4500382 U JP 4500382U JP S58147246 U JPS58147246 U JP S58147246U
Authority
JP
Japan
Prior art keywords
transfer device
transport path
liquid transfer
substrate liquid
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4500382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6234440Y2 (enrdf_load_stackoverflow
Inventor
有井　勝之
長島　節夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4500382U priority Critical patent/JPS58147246U/ja
Publication of JPS58147246U publication Critical patent/JPS58147246U/ja
Application granted granted Critical
Publication of JPS6234440Y2 publication Critical patent/JPS6234440Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Pusher Or Impeller Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP4500382U 1982-03-30 1982-03-30 基板の液体搬送装置 Granted JPS58147246U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4500382U JPS58147246U (ja) 1982-03-30 1982-03-30 基板の液体搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4500382U JPS58147246U (ja) 1982-03-30 1982-03-30 基板の液体搬送装置

Publications (2)

Publication Number Publication Date
JPS58147246U true JPS58147246U (ja) 1983-10-03
JPS6234440Y2 JPS6234440Y2 (enrdf_load_stackoverflow) 1987-09-02

Family

ID=30056044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4500382U Granted JPS58147246U (ja) 1982-03-30 1982-03-30 基板の液体搬送装置

Country Status (1)

Country Link
JP (1) JPS58147246U (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01289122A (ja) * 1988-05-17 1989-11-21 Shin Etsu Handotai Co Ltd ウェーハ自動洗浄装置
JPH06208098A (ja) * 1993-09-20 1994-07-26 Shibaura Eng Works Co Ltd 基板洗浄装置
JP2002016121A (ja) * 2000-06-30 2002-01-18 Fujikoshi Mach Corp ウェーハの収納装置
JP2007182305A (ja) * 2006-01-06 2007-07-19 Tokyo Electron Ltd 基板搬送装置、基板搬送方法及びコンピュータプログラム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285461A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Continuous treating apparatus for plate form objects
JPS5588888A (en) * 1978-12-27 1980-07-04 Hitachi Ltd Treating device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285461A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Continuous treating apparatus for plate form objects
JPS5588888A (en) * 1978-12-27 1980-07-04 Hitachi Ltd Treating device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01289122A (ja) * 1988-05-17 1989-11-21 Shin Etsu Handotai Co Ltd ウェーハ自動洗浄装置
JPH06208098A (ja) * 1993-09-20 1994-07-26 Shibaura Eng Works Co Ltd 基板洗浄装置
JP2002016121A (ja) * 2000-06-30 2002-01-18 Fujikoshi Mach Corp ウェーハの収納装置
JP2007182305A (ja) * 2006-01-06 2007-07-19 Tokyo Electron Ltd 基板搬送装置、基板搬送方法及びコンピュータプログラム

Also Published As

Publication number Publication date
JPS6234440Y2 (enrdf_load_stackoverflow) 1987-09-02

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