JPH069491Y2 - 半導体ウェーハ用ブラシスクラブ装置 - Google Patents

半導体ウェーハ用ブラシスクラブ装置

Info

Publication number
JPH069491Y2
JPH069491Y2 JP1987043110U JP4311087U JPH069491Y2 JP H069491 Y2 JPH069491 Y2 JP H069491Y2 JP 1987043110 U JP1987043110 U JP 1987043110U JP 4311087 U JP4311087 U JP 4311087U JP H069491 Y2 JPH069491 Y2 JP H069491Y2
Authority
JP
Japan
Prior art keywords
cleaning
semiconductor wafer
brush
rotating brush
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987043110U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6418731U (en, 2012
Inventor
隆弘 川端
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP1987043110U priority Critical patent/JPH069491Y2/ja
Publication of JPS6418731U publication Critical patent/JPS6418731U/ja
Application granted granted Critical
Publication of JPH069491Y2 publication Critical patent/JPH069491Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1987043110U 1987-03-24 1987-03-24 半導体ウェーハ用ブラシスクラブ装置 Expired - Lifetime JPH069491Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987043110U JPH069491Y2 (ja) 1987-03-24 1987-03-24 半導体ウェーハ用ブラシスクラブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987043110U JPH069491Y2 (ja) 1987-03-24 1987-03-24 半導体ウェーハ用ブラシスクラブ装置

Publications (2)

Publication Number Publication Date
JPS6418731U JPS6418731U (en, 2012) 1989-01-30
JPH069491Y2 true JPH069491Y2 (ja) 1994-03-09

Family

ID=31269511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987043110U Expired - Lifetime JPH069491Y2 (ja) 1987-03-24 1987-03-24 半導体ウェーハ用ブラシスクラブ装置

Country Status (1)

Country Link
JP (1) JPH069491Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2746671B2 (ja) * 1989-07-20 1998-05-06 東京エレクトロン株式会社 洗浄装置及び洗浄方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6076034U (ja) * 1983-10-27 1985-05-28 三菱電機株式会社 半導体装置，部品表面などの拭き取り装置
JPS61203545U (en, 2012) * 1985-06-11 1986-12-22

Also Published As

Publication number Publication date
JPS6418731U (en, 2012) 1989-01-30

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