JPH069011Y2 - 蒸着用るつぼ - Google Patents
蒸着用るつぼInfo
- Publication number
- JPH069011Y2 JPH069011Y2 JP5069689U JP5069689U JPH069011Y2 JP H069011 Y2 JPH069011 Y2 JP H069011Y2 JP 5069689 U JP5069689 U JP 5069689U JP 5069689 U JP5069689 U JP 5069689U JP H069011 Y2 JPH069011 Y2 JP H069011Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vapor deposition
- sintered
- pellet
- open
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007740 vapor deposition Methods 0.000 title claims description 27
- 239000008188 pellet Substances 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 6
- 239000000843 powder Substances 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5069689U JPH069011Y2 (ja) | 1989-04-28 | 1989-04-28 | 蒸着用るつぼ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5069689U JPH069011Y2 (ja) | 1989-04-28 | 1989-04-28 | 蒸着用るつぼ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02142463U JPH02142463U (enrdf_load_stackoverflow) | 1990-12-03 |
| JPH069011Y2 true JPH069011Y2 (ja) | 1994-03-09 |
Family
ID=31569466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5069689U Expired - Lifetime JPH069011Y2 (ja) | 1989-04-28 | 1989-04-28 | 蒸着用るつぼ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069011Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008100299A (ja) * | 2006-10-17 | 2008-05-01 | Hoya Corp | 蒸着材料除去装置および蒸着材料除去方法 |
-
1989
- 1989-04-28 JP JP5069689U patent/JPH069011Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008100299A (ja) * | 2006-10-17 | 2008-05-01 | Hoya Corp | 蒸着材料除去装置および蒸着材料除去方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02142463U (enrdf_load_stackoverflow) | 1990-12-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |