Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Shimadzu Corp
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Shimadzu Corp
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Publication date
Application filed by Shimadzu CorpfiledCriticalShimadzu Corp
Priority to JP4750387UpriorityCriticalpatent/JPH06748Y2/ja
Publication of JPS63155040UpublicationCriticalpatent/JPS63155040U/ja
Application grantedgrantedCritical
Publication of JPH06748Y2publicationCriticalpatent/JPH06748Y2/ja
Device for the remote control of pneumatically operated mechanisms, which has fast, high resolution response over a broad range of pressures and which is insensitive to position or vibration