JPH0650987Y2 - ウエハ吸着保持装置 - Google Patents

ウエハ吸着保持装置

Info

Publication number
JPH0650987Y2
JPH0650987Y2 JP10062785U JP10062785U JPH0650987Y2 JP H0650987 Y2 JPH0650987 Y2 JP H0650987Y2 JP 10062785 U JP10062785 U JP 10062785U JP 10062785 U JP10062785 U JP 10062785U JP H0650987 Y2 JPH0650987 Y2 JP H0650987Y2
Authority
JP
Japan
Prior art keywords
suction
wafer
holding device
dust
suction holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10062785U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6219188U (enrdf_load_stackoverflow
Inventor
輝雄 浅川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP10062785U priority Critical patent/JPH0650987Y2/ja
Publication of JPS6219188U publication Critical patent/JPS6219188U/ja
Application granted granted Critical
Publication of JPH0650987Y2 publication Critical patent/JPH0650987Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP10062785U 1985-07-02 1985-07-02 ウエハ吸着保持装置 Expired - Lifetime JPH0650987Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10062785U JPH0650987Y2 (ja) 1985-07-02 1985-07-02 ウエハ吸着保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10062785U JPH0650987Y2 (ja) 1985-07-02 1985-07-02 ウエハ吸着保持装置

Publications (2)

Publication Number Publication Date
JPS6219188U JPS6219188U (enrdf_load_stackoverflow) 1987-02-04
JPH0650987Y2 true JPH0650987Y2 (ja) 1994-12-21

Family

ID=30970622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10062785U Expired - Lifetime JPH0650987Y2 (ja) 1985-07-02 1985-07-02 ウエハ吸着保持装置

Country Status (1)

Country Link
JP (1) JPH0650987Y2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2568755Y2 (ja) * 1992-03-30 1998-04-15 株式会社芝浦製作所 ワーク搬送装置
JP5178495B2 (ja) * 2008-12-22 2013-04-10 株式会社日立ハイテクノロジーズ 試料搬送機構、及び試料搬送機構を備えた走査電子顕微鏡
KR101073546B1 (ko) 2009-08-13 2011-10-17 삼성모바일디스플레이주식회사 스토커
JP6036742B2 (ja) * 2014-04-14 2016-11-30 東京エレクトロン株式会社 集塵用治具、基板処理装置及びパーティクル捕集方法。
JP2021163819A (ja) * 2020-03-31 2021-10-11 キヤノン株式会社 搬送装置、搬送方法、リソグラフィ装置、リソグラフィシステム、および物品製造方法

Also Published As

Publication number Publication date
JPS6219188U (enrdf_load_stackoverflow) 1987-02-04

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