JPH0648846Y2 - 薄膜デバイスの製造設備 - Google Patents

薄膜デバイスの製造設備

Info

Publication number
JPH0648846Y2
JPH0648846Y2 JP1988108117U JP10811788U JPH0648846Y2 JP H0648846 Y2 JPH0648846 Y2 JP H0648846Y2 JP 1988108117 U JP1988108117 U JP 1988108117U JP 10811788 U JP10811788 U JP 10811788U JP H0648846 Y2 JPH0648846 Y2 JP H0648846Y2
Authority
JP
Japan
Prior art keywords
substrate
conveyor
loop
cleaning
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988108117U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229527U (enExample
Inventor
孝文 小嶋
信幸 山村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Priority to JP1988108117U priority Critical patent/JPH0648846Y2/ja
Publication of JPH0229527U publication Critical patent/JPH0229527U/ja
Application granted granted Critical
Publication of JPH0648846Y2 publication Critical patent/JPH0648846Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Multi-Process Working Machines And Systems (AREA)
JP1988108117U 1988-08-17 1988-08-17 薄膜デバイスの製造設備 Expired - Lifetime JPH0648846Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988108117U JPH0648846Y2 (ja) 1988-08-17 1988-08-17 薄膜デバイスの製造設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988108117U JPH0648846Y2 (ja) 1988-08-17 1988-08-17 薄膜デバイスの製造設備

Publications (2)

Publication Number Publication Date
JPH0229527U JPH0229527U (enExample) 1990-02-26
JPH0648846Y2 true JPH0648846Y2 (ja) 1994-12-12

Family

ID=31343150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988108117U Expired - Lifetime JPH0648846Y2 (ja) 1988-08-17 1988-08-17 薄膜デバイスの製造設備

Country Status (1)

Country Link
JP (1) JPH0648846Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3654597B2 (ja) * 1993-07-15 2005-06-02 株式会社ルネサステクノロジ 製造システムおよび製造方法
WO2007004347A1 (ja) * 2005-07-04 2007-01-11 Murata Manufacturing Co., Ltd. 処理システムおよび処理方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56169343A (en) * 1980-05-30 1981-12-26 Fujitsu Ltd Manufacture of semiconductor device
JPS5733952A (en) * 1980-08-11 1982-02-24 Nissan Motor Co Ltd Automatic conveyor of work
JPS63105877A (ja) * 1986-10-24 1988-05-11 Hitachi Ltd ワ−クの搬送装置
JPS63120061A (ja) * 1986-11-07 1988-05-24 Hitachi Ltd 無人搬送車への作業割付制御方式

Also Published As

Publication number Publication date
JPH0229527U (enExample) 1990-02-26

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