JPH0648830Y2 - ウェーハ搬送機 - Google Patents

ウェーハ搬送機

Info

Publication number
JPH0648830Y2
JPH0648830Y2 JP1987170188U JP17018887U JPH0648830Y2 JP H0648830 Y2 JPH0648830 Y2 JP H0648830Y2 JP 1987170188 U JP1987170188 U JP 1987170188U JP 17018887 U JP17018887 U JP 17018887U JP H0648830 Y2 JPH0648830 Y2 JP H0648830Y2
Authority
JP
Japan
Prior art keywords
wafer
temperature
support
unloading
take
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987170188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0173924U (enrdf_load_stackoverflow
Inventor
幸二 遠目塚
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1987170188U priority Critical patent/JPH0648830Y2/ja
Publication of JPH0173924U publication Critical patent/JPH0173924U/ja
Application granted granted Critical
Publication of JPH0648830Y2 publication Critical patent/JPH0648830Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1987170188U 1987-11-06 1987-11-06 ウェーハ搬送機 Expired - Lifetime JPH0648830Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987170188U JPH0648830Y2 (ja) 1987-11-06 1987-11-06 ウェーハ搬送機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987170188U JPH0648830Y2 (ja) 1987-11-06 1987-11-06 ウェーハ搬送機

Publications (2)

Publication Number Publication Date
JPH0173924U JPH0173924U (enrdf_load_stackoverflow) 1989-05-18
JPH0648830Y2 true JPH0648830Y2 (ja) 1994-12-12

Family

ID=31460914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987170188U Expired - Lifetime JPH0648830Y2 (ja) 1987-11-06 1987-11-06 ウェーハ搬送機

Country Status (1)

Country Link
JP (1) JPH0648830Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211729A (en) * 1981-06-23 1982-12-25 Fujitsu Ltd Furnace for semiconductor heat treatment
JPS619839U (ja) * 1984-06-22 1986-01-21 真空理工株式会社 半導体アニ−ル装置におけるウエハ搬送装置

Also Published As

Publication number Publication date
JPH0173924U (enrdf_load_stackoverflow) 1989-05-18

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