JPH0634368Y2 - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH0634368Y2
JPH0634368Y2 JP4090488U JP4090488U JPH0634368Y2 JP H0634368 Y2 JPH0634368 Y2 JP H0634368Y2 JP 4090488 U JP4090488 U JP 4090488U JP 4090488 U JP4090488 U JP 4090488U JP H0634368 Y2 JPH0634368 Y2 JP H0634368Y2
Authority
JP
Japan
Prior art keywords
processing
plasma
vacuum container
plasma processing
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4090488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01147232U (OSRAM
Inventor
義久 藤井
Original Assignee
エヌオーケー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エヌオーケー株式会社 filed Critical エヌオーケー株式会社
Priority to JP4090488U priority Critical patent/JPH0634368Y2/ja
Publication of JPH01147232U publication Critical patent/JPH01147232U/ja
Application granted granted Critical
Publication of JPH0634368Y2 publication Critical patent/JPH0634368Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Physical Vapour Deposition (AREA)
JP4090488U 1988-03-28 1988-03-28 プラズマ処理装置 Expired - Lifetime JPH0634368Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4090488U JPH0634368Y2 (ja) 1988-03-28 1988-03-28 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4090488U JPH0634368Y2 (ja) 1988-03-28 1988-03-28 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH01147232U JPH01147232U (OSRAM) 1989-10-11
JPH0634368Y2 true JPH0634368Y2 (ja) 1994-09-07

Family

ID=31267360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4090488U Expired - Lifetime JPH0634368Y2 (ja) 1988-03-28 1988-03-28 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0634368Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH01147232U (OSRAM) 1989-10-11

Similar Documents

Publication Publication Date Title
JPH05131132A (ja) 表面処理方法及びその装置
KR960002497A (ko) 기판처리 시스템
JP2004535037A (ja) グロー放電プラズマを用いた表面処理方法及び装置
JP3122228B2 (ja) プロセス装置
JPH0634368Y2 (ja) プラズマ処理装置
JP5010416B2 (ja) 成膜装置および成膜方法
JPH0467776B2 (OSRAM)
JPS59144132A (ja) 反応装置
JPS6025235A (ja) エツチング装置
DK155699B (da) Fremgangsmaade og apparat til overfladebehandling af foliebaner ved elektrisk coronaudladning
JPS58208326A (ja) プラズマ処理方法
JPS5931977B2 (ja) プラズマｃｖｄ装置
JP4175850B2 (ja) 非導電性多孔質体改質体の製造方法及び製造装置
JPH01137631A (ja) バレル形プラズマ剥離装置
JP2003050085A (ja) 真空処理装置
JPH0475778B2 (OSRAM)
JP4691838B2 (ja) セルロースエステルフィルムの製造方法および装置
JP3754643B2 (ja) 電極構造およびそれを用いた放電プラズマ処理装置
JPH0472378B2 (OSRAM)
JP3353585B2 (ja) プラズマ処理方法及び装置
JPS63140039U (OSRAM)
JPS60109233A (ja) プラズマ処理装置
JPH05138655A (ja) ジヤケツト付きロールのゴムライニング方法
JPS56145061A (en) Taking-up apparatus
JPH03247749A (ja) プラズマ熱処理方法