JPS63140039U - - Google Patents
Info
- Publication number
- JPS63140039U JPS63140039U JP3229487U JP3229487U JPS63140039U JP S63140039 U JPS63140039 U JP S63140039U JP 3229487 U JP3229487 U JP 3229487U JP 3229487 U JP3229487 U JP 3229487U JP S63140039 U JPS63140039 U JP S63140039U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- grounded
- gas
- grounded electrode
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000000178 monomer Substances 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Treatment Of Fiber Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3229487U JPS63140039U (OSRAM) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3229487U JPS63140039U (OSRAM) | 1987-03-05 | 1987-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140039U true JPS63140039U (OSRAM) | 1988-09-14 |
Family
ID=30838838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3229487U Pending JPS63140039U (OSRAM) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140039U (OSRAM) |
-
1987
- 1987-03-05 JP JP3229487U patent/JPS63140039U/ja active Pending