JPH0631718Y2 - ボ−ト搬送装置 - Google Patents
ボ−ト搬送装置Info
- Publication number
- JPH0631718Y2 JPH0631718Y2 JP1987095718U JP9571887U JPH0631718Y2 JP H0631718 Y2 JPH0631718 Y2 JP H0631718Y2 JP 1987095718 U JP1987095718 U JP 1987095718U JP 9571887 U JP9571887 U JP 9571887U JP H0631718 Y2 JPH0631718 Y2 JP H0631718Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- tube
- wafer
- seal plate
- notch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 17
- 230000002093 peripheral effect Effects 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987095718U JPH0631718Y2 (ja) | 1987-06-22 | 1987-06-22 | ボ−ト搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987095718U JPH0631718Y2 (ja) | 1987-06-22 | 1987-06-22 | ボ−ト搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS64327U JPS64327U (enrdf_load_stackoverflow) | 1989-01-05 |
| JPH0631718Y2 true JPH0631718Y2 (ja) | 1994-08-22 |
Family
ID=30960599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987095718U Expired - Lifetime JPH0631718Y2 (ja) | 1987-06-22 | 1987-06-22 | ボ−ト搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0631718Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4543059A (en) * | 1984-07-18 | 1985-09-24 | Quartz Engineering & Materials, Inc. | Slotted cantilever diffusion tube system and method and apparatus for loading |
-
1987
- 1987-06-22 JP JP1987095718U patent/JPH0631718Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS64327U (enrdf_load_stackoverflow) | 1989-01-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0631718Y2 (ja) | ボ−ト搬送装置 | |
| JPS5840824A (ja) | 半導体ウエハの熱処理装置 | |
| JP2601083Y2 (ja) | 縦型熱処理装置 | |
| JPS5824436Y2 (ja) | 半導体基板熱処理用ボ−ト | |
| JPH09181008A (ja) | 半導体製造装置 | |
| JPH0438516Y2 (enrdf_load_stackoverflow) | ||
| JPH0646624B2 (ja) | 熱処理装置 | |
| JPH03255621A (ja) | 熱処理炉 | |
| JPH0783002B2 (ja) | 半導体熱処理装置 | |
| JPS6021383Y2 (ja) | 熱処理炉 | |
| JPS62248221A (ja) | 半導体基板の処理方法 | |
| JPH0456322A (ja) | 熱処理装置 | |
| JP2555895B2 (ja) | 半導体ウェハー熱処理装置 | |
| JPS56115524A (en) | Heat treatment of semiconductor wafer | |
| JPH0572132U (ja) | 半導体製造装置 | |
| JPS63244734A (ja) | 酸化拡散装置 | |
| JPH08335572A (ja) | 半導体製造装置 | |
| JPH01121923U (enrdf_load_stackoverflow) | ||
| JPH01321638A (ja) | 熱処理管 | |
| JPS6116686Y2 (enrdf_load_stackoverflow) | ||
| JPS6312129A (ja) | 半導体製造装置の熱処理装置 | |
| JPS6292638U (enrdf_load_stackoverflow) | ||
| JPH0569944U (ja) | 熱処理装置 | |
| JPS6362316A (ja) | 半導体基板の支持具 | |
| JPH0369117A (ja) | 半導体装置の製造装置 |