JPS6116686Y2 - - Google Patents

Info

Publication number
JPS6116686Y2
JPS6116686Y2 JP6543480U JP6543480U JPS6116686Y2 JP S6116686 Y2 JPS6116686 Y2 JP S6116686Y2 JP 6543480 U JP6543480 U JP 6543480U JP 6543480 U JP6543480 U JP 6543480U JP S6116686 Y2 JPS6116686 Y2 JP S6116686Y2
Authority
JP
Japan
Prior art keywords
boat
substrate
substrate holding
holding boat
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6543480U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56164546U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6543480U priority Critical patent/JPS6116686Y2/ja
Publication of JPS56164546U publication Critical patent/JPS56164546U/ja
Application granted granted Critical
Publication of JPS6116686Y2 publication Critical patent/JPS6116686Y2/ja
Expired legal-status Critical Current

Links

JP6543480U 1980-05-12 1980-05-12 Expired JPS6116686Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6543480U JPS6116686Y2 (enrdf_load_stackoverflow) 1980-05-12 1980-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6543480U JPS6116686Y2 (enrdf_load_stackoverflow) 1980-05-12 1980-05-12

Publications (2)

Publication Number Publication Date
JPS56164546U JPS56164546U (enrdf_load_stackoverflow) 1981-12-07
JPS6116686Y2 true JPS6116686Y2 (enrdf_load_stackoverflow) 1986-05-22

Family

ID=29659584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6543480U Expired JPS6116686Y2 (enrdf_load_stackoverflow) 1980-05-12 1980-05-12

Country Status (1)

Country Link
JP (1) JPS6116686Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS56164546U (enrdf_load_stackoverflow) 1981-12-07

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