JPH0151051B2 - - Google Patents

Info

Publication number
JPH0151051B2
JPH0151051B2 JP56185081A JP18508181A JPH0151051B2 JP H0151051 B2 JPH0151051 B2 JP H0151051B2 JP 56185081 A JP56185081 A JP 56185081A JP 18508181 A JP18508181 A JP 18508181A JP H0151051 B2 JPH0151051 B2 JP H0151051B2
Authority
JP
Japan
Prior art keywords
gas
core tube
furnace core
protrusion
rail groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56185081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5885523A (ja
Inventor
Iwao Matsushima
Junichi Takahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
Original Assignee
NEC Home Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd filed Critical NEC Home Electronics Ltd
Priority to JP18508181A priority Critical patent/JPS5885523A/ja
Publication of JPS5885523A publication Critical patent/JPS5885523A/ja
Publication of JPH0151051B2 publication Critical patent/JPH0151051B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP18508181A 1981-11-17 1981-11-17 半導体製造装置 Granted JPS5885523A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18508181A JPS5885523A (ja) 1981-11-17 1981-11-17 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18508181A JPS5885523A (ja) 1981-11-17 1981-11-17 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5885523A JPS5885523A (ja) 1983-05-21
JPH0151051B2 true JPH0151051B2 (enrdf_load_stackoverflow) 1989-11-01

Family

ID=16164483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18508181A Granted JPS5885523A (ja) 1981-11-17 1981-11-17 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5885523A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3012521B2 (ja) * 1996-05-30 2000-02-21 山形日本電気株式会社 ウェハ搬出入装置
JP5912229B2 (ja) * 2010-06-25 2016-04-27 光洋サーモシステム株式会社 連続拡散処理装置
JP5912230B2 (ja) * 2010-06-25 2016-04-27 光洋サーモシステム株式会社 連続拡散処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242075A (en) * 1975-09-29 1977-04-01 Nippon Denso Co Ltd Device for controlling gas atmosphere in semiconductor producing equip ment
JPS53129964A (en) * 1977-04-20 1978-11-13 Hitachi Ltd Method and device for inserting and taking out of heat treatment jig
JPS5469384A (en) * 1977-11-14 1979-06-04 Matsushita Electric Ind Co Ltd Electric furnace unit

Also Published As

Publication number Publication date
JPS5885523A (ja) 1983-05-21

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