JPS5469384A - Electric furnace unit - Google Patents
Electric furnace unitInfo
- Publication number
- JPS5469384A JPS5469384A JP13689677A JP13689677A JPS5469384A JP S5469384 A JPS5469384 A JP S5469384A JP 13689677 A JP13689677 A JP 13689677A JP 13689677 A JP13689677 A JP 13689677A JP S5469384 A JPS5469384 A JP S5469384A
- Authority
- JP
- Japan
- Prior art keywords
- jig
- wafer
- wafers
- gas
- electric furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent the damage of wafers and make taking-in and out of wafers high-speed to enhance production efficiency by taking semiconductor wafers into or out from the electric furnace and holding them in the furnace by using an air bearing. CONSTITUTION:Jig 2 which takes in and out and holds wafers in a non-contact state by the air bearing system is inserted into quartz tube 1 constituting an electric furnace. In this constitution, gas such as N2 is fed from gas supply exit 21 provided in jig 2, and wafer 4 is put on one edge of jig 2. Therefore, wafter 4 floats and advances in the furnace due to gas jetted right-upward from gas jetting exit groups 2111 and 2121 provided in jig 2. Next, when the wafer reaches left-upward opened gas jetting exit group 2112, the right and the left forces are balanced, and wafer 4 becomes stationary at a prescribed position. After that, though a prescribed processing such as vapour-phase growing is performed in this state, a good production can be continued without generating pollution, warp, damage, etc., in wafer 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13689677A JPS5469384A (en) | 1977-11-14 | 1977-11-14 | Electric furnace unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13689677A JPS5469384A (en) | 1977-11-14 | 1977-11-14 | Electric furnace unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5469384A true JPS5469384A (en) | 1979-06-04 |
Family
ID=15186082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13689677A Pending JPS5469384A (en) | 1977-11-14 | 1977-11-14 | Electric furnace unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5469384A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5885523A (en) * | 1981-11-17 | 1983-05-21 | Nec Home Electronics Ltd | Semiconductor manufacturing apparatus |
| JPS59152618A (en) * | 1983-02-21 | 1984-08-31 | Hitachi Ltd | Thermal treatment and equipment for the same |
| JPS59215718A (en) * | 1983-05-23 | 1984-12-05 | Kokusai Electric Co Ltd | Infrared heat treatment apparatus for semiconductor wafer |
| JPS60110114A (en) * | 1983-11-21 | 1985-06-15 | Kokusai Electric Co Ltd | Apparatus for heat treating semiconductor substrate with infrared rays |
-
1977
- 1977-11-14 JP JP13689677A patent/JPS5469384A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5885523A (en) * | 1981-11-17 | 1983-05-21 | Nec Home Electronics Ltd | Semiconductor manufacturing apparatus |
| JPH0151051B2 (en) * | 1981-11-17 | 1989-11-01 | Nippon Denki Hoomu Erekutoronikusu Kk | |
| JPS59152618A (en) * | 1983-02-21 | 1984-08-31 | Hitachi Ltd | Thermal treatment and equipment for the same |
| JPS59215718A (en) * | 1983-05-23 | 1984-12-05 | Kokusai Electric Co Ltd | Infrared heat treatment apparatus for semiconductor wafer |
| JPS60110114A (en) * | 1983-11-21 | 1985-06-15 | Kokusai Electric Co Ltd | Apparatus for heat treating semiconductor substrate with infrared rays |
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Legal Events
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