JPS6292638U - - Google Patents

Info

Publication number
JPS6292638U
JPS6292638U JP17849986U JP17849986U JPS6292638U JP S6292638 U JPS6292638 U JP S6292638U JP 17849986 U JP17849986 U JP 17849986U JP 17849986 U JP17849986 U JP 17849986U JP S6292638 U JPS6292638 U JP S6292638U
Authority
JP
Japan
Prior art keywords
heat treatment
jig
elevating means
treatment jig
automatic loading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17849986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17849986U priority Critical patent/JPS6292638U/ja
Publication of JPS6292638U publication Critical patent/JPS6292638U/ja
Pending legal-status Critical Current

Links

JP17849986U 1986-11-20 1986-11-20 Pending JPS6292638U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17849986U JPS6292638U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17849986U JPS6292638U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Publications (1)

Publication Number Publication Date
JPS6292638U true JPS6292638U (enrdf_load_stackoverflow) 1987-06-13

Family

ID=31120686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17849986U Pending JPS6292638U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Country Status (1)

Country Link
JP (1) JPS6292638U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52154342A (en) * 1976-06-18 1977-12-22 Hitachi Ltd Diffusion furnace

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52154342A (en) * 1976-06-18 1977-12-22 Hitachi Ltd Diffusion furnace

Similar Documents

Publication Publication Date Title
JPS6292638U (enrdf_load_stackoverflow)
JPH0184428U (enrdf_load_stackoverflow)
JPS59117138U (ja) 半導体製造装置
JPS6018541U (ja) 気相成長装置
JPS6183027U (enrdf_load_stackoverflow)
JPS6074545A (ja) ウエハの着脱方法
JPH0631718Y2 (ja) ボ−ト搬送装置
JPS6214723U (enrdf_load_stackoverflow)
JPS6188233U (enrdf_load_stackoverflow)
JPS6252929U (enrdf_load_stackoverflow)
JPS63127121U (enrdf_load_stackoverflow)
JPH0367440U (enrdf_load_stackoverflow)
JPH02146425U (enrdf_load_stackoverflow)
JPH0180927U (enrdf_load_stackoverflow)
JPS63159821U (enrdf_load_stackoverflow)
JPH0167732U (enrdf_load_stackoverflow)
JPS62179239U (enrdf_load_stackoverflow)
JPS62177031U (enrdf_load_stackoverflow)
JPS63144953U (enrdf_load_stackoverflow)
JPH0371623U (enrdf_load_stackoverflow)
JPH0279024U (enrdf_load_stackoverflow)
JPS62163951U (enrdf_load_stackoverflow)
JPS63153522U (enrdf_load_stackoverflow)
JPS6265831U (enrdf_load_stackoverflow)
JPS59169040U (ja) 半導体製造用の拡散炉