JPS52154342A - Diffusion furnace - Google Patents

Diffusion furnace

Info

Publication number
JPS52154342A
JPS52154342A JP7111676A JP7111676A JPS52154342A JP S52154342 A JPS52154342 A JP S52154342A JP 7111676 A JP7111676 A JP 7111676A JP 7111676 A JP7111676 A JP 7111676A JP S52154342 A JPS52154342 A JP S52154342A
Authority
JP
Japan
Prior art keywords
diffusion furnace
transfer
highquality
jigs
building
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7111676A
Other languages
Japanese (ja)
Other versions
JPS6038017B2 (en
Inventor
Hiroto Nagatomo
Tetsuya Takagaki
Kazuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7111676A priority Critical patent/JPS6038017B2/en
Publication of JPS52154342A publication Critical patent/JPS52154342A/en
Publication of JPS6038017B2 publication Critical patent/JPS6038017B2/en
Expired legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To increase workability by mechanically performing transfer of jigs into and out from a diffusion furnace located in a high place as well as to obtain highquality products by building this transfer-in and out space into a clean room.
COPYRIGHT: (C)1977,JPO&Japio
JP7111676A 1976-06-18 1976-06-18 heat treatment furnace Expired JPS6038017B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7111676A JPS6038017B2 (en) 1976-06-18 1976-06-18 heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7111676A JPS6038017B2 (en) 1976-06-18 1976-06-18 heat treatment furnace

Publications (2)

Publication Number Publication Date
JPS52154342A true JPS52154342A (en) 1977-12-22
JPS6038017B2 JPS6038017B2 (en) 1985-08-29

Family

ID=13451261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7111676A Expired JPS6038017B2 (en) 1976-06-18 1976-06-18 heat treatment furnace

Country Status (1)

Country Link
JP (1) JPS6038017B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59125614A (en) * 1982-12-28 1984-07-20 Fujitsu Ltd Manufacture of semiconductor device
JPS59125613A (en) * 1982-12-28 1984-07-20 Fujitsu Ltd Manufacture of semiconductor device
JPS6063925A (en) * 1984-07-04 1985-04-12 Hitachi Ltd Wafer handling method
JPS6292638U (en) * 1986-11-20 1987-06-13

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59125614A (en) * 1982-12-28 1984-07-20 Fujitsu Ltd Manufacture of semiconductor device
JPS59125613A (en) * 1982-12-28 1984-07-20 Fujitsu Ltd Manufacture of semiconductor device
JPS6063925A (en) * 1984-07-04 1985-04-12 Hitachi Ltd Wafer handling method
JPS6292638U (en) * 1986-11-20 1987-06-13

Also Published As

Publication number Publication date
JPS6038017B2 (en) 1985-08-29

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