JPS6214723U - - Google Patents

Info

Publication number
JPS6214723U
JPS6214723U JP10621585U JP10621585U JPS6214723U JP S6214723 U JPS6214723 U JP S6214723U JP 10621585 U JP10621585 U JP 10621585U JP 10621585 U JP10621585 U JP 10621585U JP S6214723 U JPS6214723 U JP S6214723U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
core tube
furnace core
furnace
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10621585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143857Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10621585U priority Critical patent/JPH0143857Y2/ja
Publication of JPS6214723U publication Critical patent/JPS6214723U/ja
Application granted granted Critical
Publication of JPH0143857Y2 publication Critical patent/JPH0143857Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP10621585U 1985-07-10 1985-07-10 Expired JPH0143857Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10621585U JPH0143857Y2 (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10621585U JPH0143857Y2 (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Publications (2)

Publication Number Publication Date
JPS6214723U true JPS6214723U (enrdf_load_stackoverflow) 1987-01-29
JPH0143857Y2 JPH0143857Y2 (enrdf_load_stackoverflow) 1989-12-19

Family

ID=30981365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10621585U Expired JPH0143857Y2 (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Country Status (1)

Country Link
JP (1) JPH0143857Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0143857Y2 (enrdf_load_stackoverflow) 1989-12-19

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