JPS6365235U - - Google Patents

Info

Publication number
JPS6365235U
JPS6365235U JP15995986U JP15995986U JPS6365235U JP S6365235 U JPS6365235 U JP S6365235U JP 15995986 U JP15995986 U JP 15995986U JP 15995986 U JP15995986 U JP 15995986U JP S6365235 U JPS6365235 U JP S6365235U
Authority
JP
Japan
Prior art keywords
chamber
vacuum chamber
load lock
vacuum
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15995986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15995986U priority Critical patent/JPS6365235U/ja
Publication of JPS6365235U publication Critical patent/JPS6365235U/ja
Pending legal-status Critical Current

Links

JP15995986U 1986-10-17 1986-10-17 Pending JPS6365235U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15995986U JPS6365235U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15995986U JPS6365235U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365235U true JPS6365235U (enrdf_load_stackoverflow) 1988-04-30

Family

ID=31084878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15995986U Pending JPS6365235U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365235U (enrdf_load_stackoverflow)

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