JPS6369159U - - Google Patents

Info

Publication number
JPS6369159U
JPS6369159U JP16483386U JP16483386U JPS6369159U JP S6369159 U JPS6369159 U JP S6369159U JP 16483386 U JP16483386 U JP 16483386U JP 16483386 U JP16483386 U JP 16483386U JP S6369159 U JPS6369159 U JP S6369159U
Authority
JP
Japan
Prior art keywords
wafer
disk
target chamber
stocker
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16483386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16483386U priority Critical patent/JPS6369159U/ja
Publication of JPS6369159U publication Critical patent/JPS6369159U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16483386U 1986-10-27 1986-10-27 Pending JPS6369159U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16483386U JPS6369159U (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16483386U JPS6369159U (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Publications (1)

Publication Number Publication Date
JPS6369159U true JPS6369159U (enrdf_load_stackoverflow) 1988-05-10

Family

ID=31094316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16483386U Pending JPS6369159U (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPS6369159U (enrdf_load_stackoverflow)

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