JPH03121651U - - Google Patents

Info

Publication number
JPH03121651U
JPH03121651U JP3164590U JP3164590U JPH03121651U JP H03121651 U JPH03121651 U JP H03121651U JP 3164590 U JP3164590 U JP 3164590U JP 3164590 U JP3164590 U JP 3164590U JP H03121651 U JPH03121651 U JP H03121651U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
ion implantation
doping
impurity ions
implantation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3164590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3164590U priority Critical patent/JPH03121651U/ja
Publication of JPH03121651U publication Critical patent/JPH03121651U/ja
Pending legal-status Critical Current

Links

JP3164590U 1990-03-27 1990-03-27 Pending JPH03121651U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3164590U JPH03121651U (enrdf_load_stackoverflow) 1990-03-27 1990-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3164590U JPH03121651U (enrdf_load_stackoverflow) 1990-03-27 1990-03-27

Publications (1)

Publication Number Publication Date
JPH03121651U true JPH03121651U (enrdf_load_stackoverflow) 1991-12-12

Family

ID=31534438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3164590U Pending JPH03121651U (enrdf_load_stackoverflow) 1990-03-27 1990-03-27

Country Status (1)

Country Link
JP (1) JPH03121651U (enrdf_load_stackoverflow)

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