JPS62138439U - - Google Patents

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Publication number
JPS62138439U
JPS62138439U JP2575186U JP2575186U JPS62138439U JP S62138439 U JPS62138439 U JP S62138439U JP 2575186 U JP2575186 U JP 2575186U JP 2575186 U JP2575186 U JP 2575186U JP S62138439 U JPS62138439 U JP S62138439U
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JP
Japan
Prior art keywords
ray
rays
generates
semiconductor exposure
extraction window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2575186U
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English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2575186U priority Critical patent/JPS62138439U/ja
Publication of JPS62138439U publication Critical patent/JPS62138439U/ja
Pending legal-status Critical Current

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  • X-Ray Techniques (AREA)
JP2575186U 1986-02-26 1986-02-26 Pending JPS62138439U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2575186U JPS62138439U (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2575186U JPS62138439U (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Publications (1)

Publication Number Publication Date
JPS62138439U true JPS62138439U (enrdf_load_stackoverflow) 1987-09-01

Family

ID=30826196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2575186U Pending JPS62138439U (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Country Status (1)

Country Link
JP (1) JPS62138439U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006286623A (ja) * 2005-03-31 2006-10-19 Xtreme Technologies Gmbh 短波長放射線発生のための放射線源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006286623A (ja) * 2005-03-31 2006-10-19 Xtreme Technologies Gmbh 短波長放射線発生のための放射線源

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