JPS63112334U - - Google Patents
Info
- Publication number
- JPS63112334U JPS63112334U JP246787U JP246787U JPS63112334U JP S63112334 U JPS63112334 U JP S63112334U JP 246787 U JP246787 U JP 246787U JP 246787 U JP246787 U JP 246787U JP S63112334 U JPS63112334 U JP S63112334U
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- projection device
- utilizes
- container
- starting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003574 free electron Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000001737 promoting effect Effects 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP246787U JPS63112334U (enrdf_load_stackoverflow) | 1987-01-13 | 1987-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP246787U JPS63112334U (enrdf_load_stackoverflow) | 1987-01-13 | 1987-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112334U true JPS63112334U (enrdf_load_stackoverflow) | 1988-07-19 |
Family
ID=30781338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP246787U Pending JPS63112334U (enrdf_load_stackoverflow) | 1987-01-13 | 1987-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112334U (enrdf_load_stackoverflow) |
-
1987
- 1987-01-13 JP JP246787U patent/JPS63112334U/ja active Pending
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