JPH0628224Y2 - 基板回転処理装置 - Google Patents
基板回転処理装置Info
- Publication number
- JPH0628224Y2 JPH0628224Y2 JP13970689U JP13970689U JPH0628224Y2 JP H0628224 Y2 JPH0628224 Y2 JP H0628224Y2 JP 13970689 U JP13970689 U JP 13970689U JP 13970689 U JP13970689 U JP 13970689U JP H0628224 Y2 JPH0628224 Y2 JP H0628224Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cleaning liquid
- chuck
- groove
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 91
- 239000007788 liquid Substances 0.000 claims description 80
- 238000004140 cleaning Methods 0.000 claims description 56
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000001179 sorption measurement Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 210000000050 mohair Anatomy 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13970689U JPH0628224Y2 (ja) | 1989-11-30 | 1989-11-30 | 基板回転処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13970689U JPH0628224Y2 (ja) | 1989-11-30 | 1989-11-30 | 基板回転処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0379872U JPH0379872U (enrdf_load_stackoverflow) | 1991-08-15 |
| JPH0628224Y2 true JPH0628224Y2 (ja) | 1994-08-03 |
Family
ID=31686734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13970689U Expired - Lifetime JPH0628224Y2 (ja) | 1989-11-30 | 1989-11-30 | 基板回転処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628224Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001168011A (ja) * | 1999-12-09 | 2001-06-22 | Dainippon Screen Mfg Co Ltd | 薄膜形成装置 |
| KR100853927B1 (ko) * | 2001-04-17 | 2008-08-25 | 도쿄엘렉트론가부시키가이샤 | 도포막 형성장치 및 스핀척 |
-
1989
- 1989-11-30 JP JP13970689U patent/JPH0628224Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0379872U (enrdf_load_stackoverflow) | 1991-08-15 |
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