JPH0626903Y2 - フォトマスク又はフォトマスク用基板の吸湿体及び容器 - Google Patents

フォトマスク又はフォトマスク用基板の吸湿体及び容器

Info

Publication number
JPH0626903Y2
JPH0626903Y2 JP1988162857U JP16285788U JPH0626903Y2 JP H0626903 Y2 JPH0626903 Y2 JP H0626903Y2 JP 1988162857 U JP1988162857 U JP 1988162857U JP 16285788 U JP16285788 U JP 16285788U JP H0626903 Y2 JPH0626903 Y2 JP H0626903Y2
Authority
JP
Japan
Prior art keywords
photomask
container
substrate
bag
hygroscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1988162857U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0282041U (en, 2012
Inventor
豊 佐藤
豊重 長橋
千裕 田淵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP1988162857U priority Critical patent/JPH0626903Y2/ja
Publication of JPH0282041U publication Critical patent/JPH0282041U/ja
Application granted granted Critical
Publication of JPH0626903Y2 publication Critical patent/JPH0626903Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1988162857U 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の吸湿体及び容器 Expired - Fee Related JPH0626903Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988162857U JPH0626903Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の吸湿体及び容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988162857U JPH0626903Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の吸湿体及び容器

Publications (2)

Publication Number Publication Date
JPH0282041U JPH0282041U (en, 2012) 1990-06-25
JPH0626903Y2 true JPH0626903Y2 (ja) 1994-07-20

Family

ID=31447067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988162857U Expired - Fee Related JPH0626903Y2 (ja) 1988-12-15 1988-12-15 フォトマスク又はフォトマスク用基板の吸湿体及び容器

Country Status (1)

Country Link
JP (1) JPH0626903Y2 (en, 2012)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046114U (ja) * 1983-09-05 1985-04-01 加藤　隆義 湿度調整体
JPH069652B2 (ja) * 1985-02-08 1994-02-09 積水化学工業株式会社 複合シ−ト及び脱湿具
JPH056377Y2 (en, 2012) * 1986-04-07 1993-02-18

Also Published As

Publication number Publication date
JPH0282041U (en, 2012) 1990-06-25

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees