JPH0622917Y2 - 電子線照射装置 - Google Patents
電子線照射装置Info
- Publication number
- JPH0622917Y2 JPH0622917Y2 JP1987108702U JP10870287U JPH0622917Y2 JP H0622917 Y2 JPH0622917 Y2 JP H0622917Y2 JP 1987108702 U JP1987108702 U JP 1987108702U JP 10870287 U JP10870287 U JP 10870287U JP H0622917 Y2 JPH0622917 Y2 JP H0622917Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- irradiation
- electron beam
- irradiation chamber
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 9
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 238000002955 isolation Methods 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 7
- 229910001882 dioxygen Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108702U JPH0622917Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108702U JPH0622917Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6413662U JPS6413662U (en, 2012) | 1989-01-24 |
| JPH0622917Y2 true JPH0622917Y2 (ja) | 1994-06-15 |
Family
ID=31344284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987108702U Expired - Lifetime JPH0622917Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622917Y2 (en, 2012) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50318A (en, 2012) * | 1973-05-08 | 1975-01-06 |
-
1987
- 1987-07-14 JP JP1987108702U patent/JPH0622917Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6413662U (en, 2012) | 1989-01-24 |
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