JPH0617804Y2 - 基板受取装置 - Google Patents
基板受取装置Info
- Publication number
- JPH0617804Y2 JPH0617804Y2 JP2103188U JP2103188U JPH0617804Y2 JP H0617804 Y2 JPH0617804 Y2 JP H0617804Y2 JP 2103188 U JP2103188 U JP 2103188U JP 2103188 U JP2103188 U JP 2103188U JP H0617804 Y2 JPH0617804 Y2 JP H0617804Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- arm
- stocker
- rotary stocker
- receiving device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Discharge By Other Means (AREA)
- Pile Receivers (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2103188U JPH0617804Y2 (ja) | 1988-02-19 | 1988-02-19 | 基板受取装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2103188U JPH0617804Y2 (ja) | 1988-02-19 | 1988-02-19 | 基板受取装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01126365U JPH01126365U (enrdf_load_stackoverflow) | 1989-08-29 |
JPH0617804Y2 true JPH0617804Y2 (ja) | 1994-05-11 |
Family
ID=31237901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2103188U Expired - Lifetime JPH0617804Y2 (ja) | 1988-02-19 | 1988-02-19 | 基板受取装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0617804Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2700721B2 (ja) * | 1991-04-01 | 1998-01-21 | ダイワ技研株式会社 | プリント配線板のための受取機 |
-
1988
- 1988-02-19 JP JP2103188U patent/JPH0617804Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01126365U (enrdf_load_stackoverflow) | 1989-08-29 |
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