JPH0617320Y2 - メモリ装置 - Google Patents
メモリ装置Info
- Publication number
- JPH0617320Y2 JPH0617320Y2 JP1987178058U JP17805887U JPH0617320Y2 JP H0617320 Y2 JPH0617320 Y2 JP H0617320Y2 JP 1987178058 U JP1987178058 U JP 1987178058U JP 17805887 U JP17805887 U JP 17805887U JP H0617320 Y2 JPH0617320 Y2 JP H0617320Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- capacitive element
- layer
- memory cells
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010410 layer Substances 0.000 description 40
- 238000004519 manufacturing process Methods 0.000 description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000010306 acid treatment Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Semiconductor Memories (AREA)
- Dram (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178058U JPH0617320Y2 (ja) | 1987-11-21 | 1987-11-21 | メモリ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178058U JPH0617320Y2 (ja) | 1987-11-21 | 1987-11-21 | メモリ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0183350U JPH0183350U (OSRAM) | 1989-06-02 |
| JPH0617320Y2 true JPH0617320Y2 (ja) | 1994-05-02 |
Family
ID=31469692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178058U Expired - Lifetime JPH0617320Y2 (ja) | 1987-11-21 | 1987-11-21 | メモリ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617320Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100440432B1 (ko) * | 1999-06-21 | 2004-07-15 | 니쉰 컴퍼니., 엘티디 | 물품 수납용 컨테이너 |
-
1987
- 1987-11-21 JP JP1987178058U patent/JPH0617320Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100440432B1 (ko) * | 1999-06-21 | 2004-07-15 | 니쉰 컴퍼니., 엘티디 | 물품 수납용 컨테이너 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0183350U (OSRAM) | 1989-06-02 |
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