JPH0617299Y2 - 半導体製造装置用ステージへの被処理材固定装置 - Google Patents

半導体製造装置用ステージへの被処理材固定装置

Info

Publication number
JPH0617299Y2
JPH0617299Y2 JP1987155789U JP15578987U JPH0617299Y2 JP H0617299 Y2 JPH0617299 Y2 JP H0617299Y2 JP 1987155789 U JP1987155789 U JP 1987155789U JP 15578987 U JP15578987 U JP 15578987U JP H0617299 Y2 JPH0617299 Y2 JP H0617299Y2
Authority
JP
Japan
Prior art keywords
processed
stage
edge portion
size
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987155789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160538U (enrdf_load_stackoverflow
Inventor
章 鈴木
昭 岩瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1987155789U priority Critical patent/JPH0617299Y2/ja
Publication of JPH0160538U publication Critical patent/JPH0160538U/ja
Application granted granted Critical
Publication of JPH0617299Y2 publication Critical patent/JPH0617299Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1987155789U 1987-10-12 1987-10-12 半導体製造装置用ステージへの被処理材固定装置 Expired - Lifetime JPH0617299Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987155789U JPH0617299Y2 (ja) 1987-10-12 1987-10-12 半導体製造装置用ステージへの被処理材固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987155789U JPH0617299Y2 (ja) 1987-10-12 1987-10-12 半導体製造装置用ステージへの被処理材固定装置

Publications (2)

Publication Number Publication Date
JPH0160538U JPH0160538U (enrdf_load_stackoverflow) 1989-04-17
JPH0617299Y2 true JPH0617299Y2 (ja) 1994-05-02

Family

ID=31433727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987155789U Expired - Lifetime JPH0617299Y2 (ja) 1987-10-12 1987-10-12 半導体製造装置用ステージへの被処理材固定装置

Country Status (1)

Country Link
JP (1) JPH0617299Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3323291C2 (de) * 1983-06-28 1985-04-25 Windmöller & Hölscher, 4540 Lengerich Vorrichtung zum Überführen von flachen Werkstücken in eine Werkstückschuppe
JPS6010983U (ja) * 1983-07-02 1985-01-25 住友電気工業株式会社 補強入りポリエチレンパイプ

Also Published As

Publication number Publication date
JPH0160538U (enrdf_load_stackoverflow) 1989-04-17

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