JPH058670Y2 - - Google Patents
Info
- Publication number
- JPH058670Y2 JPH058670Y2 JP13526185U JP13526185U JPH058670Y2 JP H058670 Y2 JPH058670 Y2 JP H058670Y2 JP 13526185 U JP13526185 U JP 13526185U JP 13526185 U JP13526185 U JP 13526185U JP H058670 Y2 JPH058670 Y2 JP H058670Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- reaction chamber
- irradiation window
- reaction
- inclined surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 23
- 238000006243 chemical reaction Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000012495 reaction gas Substances 0.000 claims description 8
- 230000002265 prevention Effects 0.000 claims description 7
- 230000003449 preventive effect Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 229910052753 mercury Inorganic materials 0.000 description 8
- 230000007423 decrease Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 206010070834 Sensitisation Diseases 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 230000008313 sensitization Effects 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13526185U JPH058670Y2 (enrdf_load_stackoverflow) | 1985-09-04 | 1985-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13526185U JPH058670Y2 (enrdf_load_stackoverflow) | 1985-09-04 | 1985-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244435U JPS6244435U (enrdf_load_stackoverflow) | 1987-03-17 |
| JPH058670Y2 true JPH058670Y2 (enrdf_load_stackoverflow) | 1993-03-04 |
Family
ID=31037276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13526185U Expired - Lifetime JPH058670Y2 (enrdf_load_stackoverflow) | 1985-09-04 | 1985-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058670Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-09-04 JP JP13526185U patent/JPH058670Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6244435U (enrdf_load_stackoverflow) | 1987-03-17 |
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