JPH0342038Y2 - - Google Patents
Info
- Publication number
- JPH0342038Y2 JPH0342038Y2 JP530186U JP530186U JPH0342038Y2 JP H0342038 Y2 JPH0342038 Y2 JP H0342038Y2 JP 530186 U JP530186 U JP 530186U JP 530186 U JP530186 U JP 530186U JP H0342038 Y2 JPH0342038 Y2 JP H0342038Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor pressure
- pressure oil
- light source
- low vapor
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000012495 reaction gas Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 27
- 239000003921 oil Substances 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 13
- 239000007789 gas Substances 0.000 description 9
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP530186U JPH0342038Y2 (enrdf_load_stackoverflow) | 1986-01-17 | 1986-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP530186U JPH0342038Y2 (enrdf_load_stackoverflow) | 1986-01-17 | 1986-01-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62118519U JPS62118519U (enrdf_load_stackoverflow) | 1987-07-28 |
| JPH0342038Y2 true JPH0342038Y2 (enrdf_load_stackoverflow) | 1991-09-03 |
Family
ID=30786755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP530186U Expired JPH0342038Y2 (enrdf_load_stackoverflow) | 1986-01-17 | 1986-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342038Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-01-17 JP JP530186U patent/JPH0342038Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62118519U (enrdf_load_stackoverflow) | 1987-07-28 |
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