JPS6244435U - - Google Patents

Info

Publication number
JPS6244435U
JPS6244435U JP13526185U JP13526185U JPS6244435U JP S6244435 U JPS6244435 U JP S6244435U JP 13526185 U JP13526185 U JP 13526185U JP 13526185 U JP13526185 U JP 13526185U JP S6244435 U JPS6244435 U JP S6244435U
Authority
JP
Japan
Prior art keywords
photo
reaction chamber
pressure oil
vapor pressure
cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13526185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058670Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13526185U priority Critical patent/JPH058670Y2/ja
Publication of JPS6244435U publication Critical patent/JPS6244435U/ja
Application granted granted Critical
Publication of JPH058670Y2 publication Critical patent/JPH058670Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP13526185U 1985-09-04 1985-09-04 Expired - Lifetime JPH058670Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13526185U JPH058670Y2 (enrdf_load_stackoverflow) 1985-09-04 1985-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13526185U JPH058670Y2 (enrdf_load_stackoverflow) 1985-09-04 1985-09-04

Publications (2)

Publication Number Publication Date
JPS6244435U true JPS6244435U (enrdf_load_stackoverflow) 1987-03-17
JPH058670Y2 JPH058670Y2 (enrdf_load_stackoverflow) 1993-03-04

Family

ID=31037276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13526185U Expired - Lifetime JPH058670Y2 (enrdf_load_stackoverflow) 1985-09-04 1985-09-04

Country Status (1)

Country Link
JP (1) JPH058670Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH058670Y2 (enrdf_load_stackoverflow) 1993-03-04

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