JPS63164214U - - Google Patents

Info

Publication number
JPS63164214U
JPS63164214U JP5700187U JP5700187U JPS63164214U JP S63164214 U JPS63164214 U JP S63164214U JP 5700187 U JP5700187 U JP 5700187U JP 5700187 U JP5700187 U JP 5700187U JP S63164214 U JPS63164214 U JP S63164214U
Authority
JP
Japan
Prior art keywords
photo
vapor pressure
pressure oil
low vapor
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5700187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0632677Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987057001U priority Critical patent/JPH0632677Y2/ja
Publication of JPS63164214U publication Critical patent/JPS63164214U/ja
Application granted granted Critical
Publication of JPH0632677Y2 publication Critical patent/JPH0632677Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1987057001U 1987-04-15 1987-04-15 光cvd装置 Expired - Lifetime JPH0632677Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987057001U JPH0632677Y2 (ja) 1987-04-15 1987-04-15 光cvd装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987057001U JPH0632677Y2 (ja) 1987-04-15 1987-04-15 光cvd装置

Publications (2)

Publication Number Publication Date
JPS63164214U true JPS63164214U (enrdf_load_stackoverflow) 1988-10-26
JPH0632677Y2 JPH0632677Y2 (ja) 1994-08-24

Family

ID=30886313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987057001U Expired - Lifetime JPH0632677Y2 (ja) 1987-04-15 1987-04-15 光cvd装置

Country Status (1)

Country Link
JP (1) JPH0632677Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63130776A (ja) * 1986-11-19 1988-06-02 Hitachi Ltd Cvd装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63130776A (ja) * 1986-11-19 1988-06-02 Hitachi Ltd Cvd装置

Also Published As

Publication number Publication date
JPH0632677Y2 (ja) 1994-08-24

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