JPS63164214U - - Google Patents
Info
- Publication number
- JPS63164214U JPS63164214U JP5700187U JP5700187U JPS63164214U JP S63164214 U JPS63164214 U JP S63164214U JP 5700187 U JP5700187 U JP 5700187U JP 5700187 U JP5700187 U JP 5700187U JP S63164214 U JPS63164214 U JP S63164214U
- Authority
- JP
- Japan
- Prior art keywords
- photo
- vapor pressure
- pressure oil
- low vapor
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987057001U JPH0632677Y2 (ja) | 1987-04-15 | 1987-04-15 | 光cvd装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987057001U JPH0632677Y2 (ja) | 1987-04-15 | 1987-04-15 | 光cvd装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63164214U true JPS63164214U (enrdf_load_stackoverflow) | 1988-10-26 |
JPH0632677Y2 JPH0632677Y2 (ja) | 1994-08-24 |
Family
ID=30886313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987057001U Expired - Lifetime JPH0632677Y2 (ja) | 1987-04-15 | 1987-04-15 | 光cvd装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0632677Y2 (enrdf_load_stackoverflow) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63130776A (ja) * | 1986-11-19 | 1988-06-02 | Hitachi Ltd | Cvd装置 |
-
1987
- 1987-04-15 JP JP1987057001U patent/JPH0632677Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63130776A (ja) * | 1986-11-19 | 1988-06-02 | Hitachi Ltd | Cvd装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0632677Y2 (ja) | 1994-08-24 |