JPS63149522U - - Google Patents

Info

Publication number
JPS63149522U
JPS63149522U JP4138887U JP4138887U JPS63149522U JP S63149522 U JPS63149522 U JP S63149522U JP 4138887 U JP4138887 U JP 4138887U JP 4138887 U JP4138887 U JP 4138887U JP S63149522 U JPS63149522 U JP S63149522U
Authority
JP
Japan
Prior art keywords
recess
pressure oil
vapor pressure
reaction chamber
low vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4138887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0610673Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4138887U priority Critical patent/JPH0610673Y2/ja
Publication of JPS63149522U publication Critical patent/JPS63149522U/ja
Application granted granted Critical
Publication of JPH0610673Y2 publication Critical patent/JPH0610673Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP4138887U 1987-03-20 1987-03-20 光cvd装置 Expired - Lifetime JPH0610673Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4138887U JPH0610673Y2 (ja) 1987-03-20 1987-03-20 光cvd装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4138887U JPH0610673Y2 (ja) 1987-03-20 1987-03-20 光cvd装置

Publications (2)

Publication Number Publication Date
JPS63149522U true JPS63149522U (enrdf_load_stackoverflow) 1988-10-03
JPH0610673Y2 JPH0610673Y2 (ja) 1994-03-16

Family

ID=30856344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4138887U Expired - Lifetime JPH0610673Y2 (ja) 1987-03-20 1987-03-20 光cvd装置

Country Status (1)

Country Link
JP (1) JPH0610673Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0610673Y2 (ja) 1994-03-16

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