JPS63149965U - - Google Patents

Info

Publication number
JPS63149965U
JPS63149965U JP4020387U JP4020387U JPS63149965U JP S63149965 U JPS63149965 U JP S63149965U JP 4020387 U JP4020387 U JP 4020387U JP 4020387 U JP4020387 U JP 4020387U JP S63149965 U JPS63149965 U JP S63149965U
Authority
JP
Japan
Prior art keywords
cvd apparatus
cleaning
entrance window
photo
cleaning member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4020387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4020387U priority Critical patent/JPS63149965U/ja
Publication of JPS63149965U publication Critical patent/JPS63149965U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP4020387U 1987-03-19 1987-03-19 Pending JPS63149965U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4020387U JPS63149965U (enrdf_load_stackoverflow) 1987-03-19 1987-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4020387U JPS63149965U (enrdf_load_stackoverflow) 1987-03-19 1987-03-19

Publications (1)

Publication Number Publication Date
JPS63149965U true JPS63149965U (enrdf_load_stackoverflow) 1988-10-03

Family

ID=30854081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4020387U Pending JPS63149965U (enrdf_load_stackoverflow) 1987-03-19 1987-03-19

Country Status (1)

Country Link
JP (1) JPS63149965U (enrdf_load_stackoverflow)

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