JPS63115064U - - Google Patents

Info

Publication number
JPS63115064U
JPS63115064U JP409787U JP409787U JPS63115064U JP S63115064 U JPS63115064 U JP S63115064U JP 409787 U JP409787 U JP 409787U JP 409787 U JP409787 U JP 409787U JP S63115064 U JPS63115064 U JP S63115064U
Authority
JP
Japan
Prior art keywords
observation window
window glass
vacuum evaporation
vapor
evaporation apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP409787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP409787U priority Critical patent/JPS63115064U/ja
Publication of JPS63115064U publication Critical patent/JPS63115064U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP409787U 1987-01-14 1987-01-14 Pending JPS63115064U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP409787U JPS63115064U (enrdf_load_stackoverflow) 1987-01-14 1987-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP409787U JPS63115064U (enrdf_load_stackoverflow) 1987-01-14 1987-01-14

Publications (1)

Publication Number Publication Date
JPS63115064U true JPS63115064U (enrdf_load_stackoverflow) 1988-07-25

Family

ID=30784458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP409787U Pending JPS63115064U (enrdf_load_stackoverflow) 1987-01-14 1987-01-14

Country Status (1)

Country Link
JP (1) JPS63115064U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004205134A (ja) * 2002-12-26 2004-07-22 Toho Titanium Co Ltd 電子ビーム溶解炉の覗き窓部およびその運転方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004205134A (ja) * 2002-12-26 2004-07-22 Toho Titanium Co Ltd 電子ビーム溶解炉の覗き窓部およびその運転方法

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