JPS63115064U - - Google Patents
Info
- Publication number
- JPS63115064U JPS63115064U JP409787U JP409787U JPS63115064U JP S63115064 U JPS63115064 U JP S63115064U JP 409787 U JP409787 U JP 409787U JP 409787 U JP409787 U JP 409787U JP S63115064 U JPS63115064 U JP S63115064U
- Authority
- JP
- Japan
- Prior art keywords
- observation window
- window glass
- vacuum evaporation
- vapor
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 239000005357 flat glass Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、本考案の一実施例を示す縦断面図、
第２図は公知の真空蒸着装置の観察窓を示す縦断
面図である。
５……観察窓、６，７……フランジ、１１……
ガス導入口、１２……ガス噴出口、１３……ガス
案内管、１４……本体輪環。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention;
FIG. 2 is a longitudinal sectional view showing an observation window of a known vacuum evaporation apparatus. 5...Observation window, 6,7...Flange, 11...
Gas inlet, 12... gas ejection port, 13... gas guide pipe, 14... main body ring.
Claims (1)
リング用ガスを噴射し、上記窓ガラス内面に蒸着
物質遮蔽ガスカーテンを形成することを特徴とす
る真空蒸着装置の観察窓。 An observation window for a vacuum evaporation apparatus, characterized in that a sputtering gas is injected onto the inner surface of the observation window glass to form a vapor-depositing substance shielding gas curtain on the inner surface of the window glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP409787U JPS63115064U (en) | 1987-01-14 | 1987-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP409787U JPS63115064U (en) | 1987-01-14 | 1987-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115064U true JPS63115064U (en) | 1988-07-25 |
Family
ID=30784458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP409787U Pending JPS63115064U (en) | 1987-01-14 | 1987-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115064U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004205134A (en) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | Inspection window for electron beam melting furnace and its operating method |
-
1987
- 1987-01-14 JP JP409787U patent/JPS63115064U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004205134A (en) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | Inspection window for electron beam melting furnace and its operating method |