JPS63160471U - - Google Patents
Info
- Publication number
- JPS63160471U JPS63160471U JP5206987U JP5206987U JPS63160471U JP S63160471 U JPS63160471 U JP S63160471U JP 5206987 U JP5206987 U JP 5206987U JP 5206987 U JP5206987 U JP 5206987U JP S63160471 U JPS63160471 U JP S63160471U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- ring
- entrance
- rectangular cross
- fitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gasket Seals (AREA)
Description
第１図は、本考案によるＯリング用溝の断面図
、第２図は、Ｏリングに押圧力がかかつた状態を
示す断面図、第３図は、Ｏリングに対する押圧力
が解除された状態を示す断面図及び第４図ないし
第６図は、従来のＯリング用溝の断面図である。
図中、１……Ｏリング、２……溝、３……長方
形横断面部、４……溝の入口、５，５ａ……テー
パー部、６……水平面。
Fig. 1 is a cross-sectional view of the O-ring groove according to the present invention, Fig. 2 is a cross-sectional view showing the O-ring under pressure, and Fig. 3 is the O-ring when the pressure is released. A cross-sectional view showing the state and FIGS. 4 to 6 are cross-sectional views of a conventional O-ring groove. In the figure, 1...O-ring, 2...Groove, 3...Rectangular cross section, 4...Groove entrance, 5, 5a...Tapered portion, 6...Horizontal surface.
Claims (1)
の横断面形状を長方形とし、該溝入口にテーパー
部を設けたことを特徴とするＯリング用溝。 1. A groove for an O-ring, in a vacuum seal portion, the groove into which the O-ring is fitted has a rectangular cross-sectional shape, and a tapered portion is provided at the entrance of the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5206987U JPS63160471U (en) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5206987U JPS63160471U (en) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63160471U true JPS63160471U (en) | 1988-10-20 |
Family
ID=30876908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5206987U Pending JPS63160471U (en) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63160471U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005140240A (en) * | 2003-11-06 | 2005-06-02 | Max Co Ltd | Seal mechanism in coupler |
| JP2019533909A (en) * | 2016-11-10 | 2019-11-21 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Load port apparatus, system, and method for manufacturing electronic devices |
-
1987
- 1987-04-08 JP JP5206987U patent/JPS63160471U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005140240A (en) * | 2003-11-06 | 2005-06-02 | Max Co Ltd | Seal mechanism in coupler |
| JP2019533909A (en) * | 2016-11-10 | 2019-11-21 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Load port apparatus, system, and method for manufacturing electronic devices |
| TWI743246B (en) * | 2016-11-10 | 2021-10-21 | 美商應用材料股份有限公司 | Electronic device manufacturing load port apparatus, systems, and methods |