JPS6390435U - - Google Patents
Info
- Publication number
- JPS6390435U JPS6390435U JP18296386U JP18296386U JPS6390435U JP S6390435 U JPS6390435 U JP S6390435U JP 18296386 U JP18296386 U JP 18296386U JP 18296386 U JP18296386 U JP 18296386U JP S6390435 U JPS6390435 U JP S6390435U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- sealing
- vacuum device
- ratio
- sectional area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Gasket Seals (AREA)
Description
第１図は本考案に係る真空装置のシール構造の
実施例を示す断面図、第２図は同シール構造にお
けるＯリング溝の断面図、第３図は従来の真空装
置のシール構造を示す断面図、第４図及び第５図
は同シール構造を示す説明図である。
１……真空装置、２，３……リンク、４……デ
イスク、５……装置本体、６……Ｏリング溝、７
……Ｏリング。
Fig. 1 is a sectional view showing an embodiment of the seal structure of a vacuum device according to the present invention, Fig. 2 is a sectional view of an O-ring groove in the same seal structure, and Fig. 3 is a sectional view showing a conventional seal structure of a vacuum device. 4 and 5 are explanatory diagrams showing the same seal structure. 1... Vacuum device, 2, 3... Link, 4... Disk, 5... Device body, 6... O-ring groove, 7
...O-ring.
Claims (1)
にシール面を有したシール部材を密着してシール
する真空装置のシール構造において、上記Ｏリン
グの太さＤとつぶし代ｄとの比をｄ／Ｄ＝０．１
８〜０．２２とし、上記Ｏリング溝の横断面積Ａ
とＯリングの横断面積ａとの比をａ／Ａ＝０．８
〜０．８５とすることを特徴とする真空装置のシ
ール構造。 In the sealing structure of a vacuum device in which an O-ring is fitted into an O-ring groove and a sealing member having a sealing surface is tightly attached to the O-ring for sealing, the ratio between the thickness D of the O-ring and the crushing allowance d is d/D=0.1
8 to 0.22, and the cross-sectional area A of the O-ring groove is
The ratio of the cross-sectional area a of the O-ring to a/A=0.8
A seal structure for a vacuum device, characterized in that the sealing structure is set to 0.85.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296386U JPS6390435U (en) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296386U JPS6390435U (en) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390435U true JPS6390435U (en) | 1988-06-11 |
Family
ID=31129254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18296386U Pending JPS6390435U (en) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390435U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0398363U (en) * | 1990-01-29 | 1991-10-11 | ||
| JP2006019101A (en) * | 2004-06-30 | 2006-01-19 | Canon Inc | Manufacturing device and manufacturing method of vacuum equipment, charged particle beam exposure device, and device manufacturing method |
| JP2009176822A (en) * | 2008-01-22 | 2009-08-06 | Tokyo Electron Ltd | Sealing mechanism, sealing groove, sealing member, and substrate processing apparatus |
-
1986
- 1986-11-28 JP JP18296386U patent/JPS6390435U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0398363U (en) * | 1990-01-29 | 1991-10-11 | ||
| JP2006019101A (en) * | 2004-06-30 | 2006-01-19 | Canon Inc | Manufacturing device and manufacturing method of vacuum equipment, charged particle beam exposure device, and device manufacturing method |
| JP4559137B2 (en) * | 2004-06-30 | 2010-10-06 | キヤノン株式会社 | Vacuum equipment manufacturing apparatus and manufacturing method |
| JP2009176822A (en) * | 2008-01-22 | 2009-08-06 | Tokyo Electron Ltd | Sealing mechanism, sealing groove, sealing member, and substrate processing apparatus |