JPS63170456U - - Google Patents

Info

Publication number
JPS63170456U
JPS63170456U JP6298087U JP6298087U JPS63170456U JP S63170456 U JPS63170456 U JP S63170456U JP 6298087 U JP6298087 U JP 6298087U JP 6298087 U JP6298087 U JP 6298087U JP S63170456 U JPS63170456 U JP S63170456U
Authority
JP
Japan
Prior art keywords
vacuum chamber
communicates
dust collector
gas cylinder
outlet tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6298087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543088Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987062980U priority Critical patent/JPH0543088Y2/ja
Publication of JPS63170456U publication Critical patent/JPS63170456U/ja
Application granted granted Critical
Publication of JPH0543088Y2 publication Critical patent/JPH0543088Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987062980U 1987-04-24 1987-04-24 Expired - Lifetime JPH0543088Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987062980U JPH0543088Y2 (enrdf_load_stackoverflow) 1987-04-24 1987-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987062980U JPH0543088Y2 (enrdf_load_stackoverflow) 1987-04-24 1987-04-24

Publications (2)

Publication Number Publication Date
JPS63170456U true JPS63170456U (enrdf_load_stackoverflow) 1988-11-07
JPH0543088Y2 JPH0543088Y2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=30897775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987062980U Expired - Lifetime JPH0543088Y2 (enrdf_load_stackoverflow) 1987-04-24 1987-04-24

Country Status (1)

Country Link
JP (1) JPH0543088Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133336A (ja) * 1982-10-22 1984-07-31 メカンアルベツト・ドンメルダンジエ・エス・ア・エ−ル・エル 精錬工程中に金属浴に気体および固体物質を供給する装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133336A (ja) * 1982-10-22 1984-07-31 メカンアルベツト・ドンメルダンジエ・エス・ア・エ−ル・エル 精錬工程中に金属浴に気体および固体物質を供給する装置

Also Published As

Publication number Publication date
JPH0543088Y2 (enrdf_load_stackoverflow) 1993-10-29

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