JPH0632677Y2 - 光ｃｖｄ装置 - Google Patents
光ｃｖｄ装置Info
- Publication number
- JPH0632677Y2 JPH0632677Y2 JP1987057001U JP5700187U JPH0632677Y2 JP H0632677 Y2 JPH0632677 Y2 JP H0632677Y2 JP 1987057001 U JP1987057001 U JP 1987057001U JP 5700187 U JP5700187 U JP 5700187U JP H0632677 Y2 JPH0632677 Y2 JP H0632677Y2
- Authority
- JP
- Japan
- Prior art keywords
- light source
- reaction
- vapor pressure
- film
- low vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims 2
- 238000006243 chemical reaction Methods 0.000 claims description 23
- 239000012495 reaction gas Substances 0.000 claims description 15
- 238000004140 cleaning Methods 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 7
- 238000000354 decomposition reaction Methods 0.000 claims description 4
- 239000003921 oil Substances 0.000 description 24
- 239000010408 film Substances 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000003925 fat Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000014593 oils and fats Nutrition 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987057001U JPH0632677Y2 (ja) | 1987-04-15 | 1987-04-15 | 光ｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987057001U JPH0632677Y2 (ja) | 1987-04-15 | 1987-04-15 | 光ｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63164214U JPS63164214U (enrdf_load_stackoverflow) | 1988-10-26 |
| JPH0632677Y2 true JPH0632677Y2 (ja) | 1994-08-24 |
Family
ID=30886313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987057001U Expired - Lifetime JPH0632677Y2 (ja) | 1987-04-15 | 1987-04-15 | 光ｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632677Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63130776A (ja) * | 1986-11-19 | 1988-06-02 | Hitachi Ltd | Ｃｖｄ装置 |
-
1987
- 1987-04-15 JP JP1987057001U patent/JPH0632677Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63164214U (enrdf_load_stackoverflow) | 1988-10-26 |
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