JPH0221652U - - Google Patents

Info

Publication number
JPH0221652U
JPH0221652U JP10072288U JP10072288U JPH0221652U JP H0221652 U JPH0221652 U JP H0221652U JP 10072288 U JP10072288 U JP 10072288U JP 10072288 U JP10072288 U JP 10072288U JP H0221652 U JPH0221652 U JP H0221652U
Authority
JP
Japan
Prior art keywords
frame
suction hole
bed
elastic member
disposed above
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10072288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10072288U priority Critical patent/JPH0221652U/ja
Publication of JPH0221652U publication Critical patent/JPH0221652U/ja
Pending legal-status Critical Current

Links

JP10072288U 1988-07-29 1988-07-29 Pending JPH0221652U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10072288U JPH0221652U (enrdf_load_stackoverflow) 1988-07-29 1988-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10072288U JPH0221652U (enrdf_load_stackoverflow) 1988-07-29 1988-07-29

Publications (1)

Publication Number Publication Date
JPH0221652U true JPH0221652U (enrdf_load_stackoverflow) 1990-02-14

Family

ID=31329055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10072288U Pending JPH0221652U (enrdf_load_stackoverflow) 1988-07-29 1988-07-29

Country Status (1)

Country Link
JP (1) JPH0221652U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190066584A (ko) * 2017-12-05 2019-06-13 가부시키가이샤 아도텟쿠 엔지니아린구 마스크 유닛 및 노광 장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190066584A (ko) * 2017-12-05 2019-06-13 가부시키가이샤 아도텟쿠 엔지니아린구 마스크 유닛 및 노광 장치
JP2019101306A (ja) * 2017-12-05 2019-06-24 株式会社アドテックエンジニアリング マスクユニット及び露光装置
TWI782139B (zh) * 2017-12-05 2022-11-01 日商亞多特克工程股份有限公司 光罩單元及曝光裝置

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