JPS6264770U - - Google Patents

Info

Publication number
JPS6264770U
JPS6264770U JP15382585U JP15382585U JPS6264770U JP S6264770 U JPS6264770 U JP S6264770U JP 15382585 U JP15382585 U JP 15382585U JP 15382585 U JP15382585 U JP 15382585U JP S6264770 U JPS6264770 U JP S6264770U
Authority
JP
Japan
Prior art keywords
thin film
film forming
transparent body
substrate
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15382585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15382585U priority Critical patent/JPS6264770U/ja
Publication of JPS6264770U publication Critical patent/JPS6264770U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP15382585U 1985-10-08 1985-10-08 Pending JPS6264770U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15382585U JPS6264770U (enrdf_load_stackoverflow) 1985-10-08 1985-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15382585U JPS6264770U (enrdf_load_stackoverflow) 1985-10-08 1985-10-08

Publications (1)

Publication Number Publication Date
JPS6264770U true JPS6264770U (enrdf_load_stackoverflow) 1987-04-22

Family

ID=31073056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15382585U Pending JPS6264770U (enrdf_load_stackoverflow) 1985-10-08 1985-10-08

Country Status (1)

Country Link
JP (1) JPS6264770U (enrdf_load_stackoverflow)

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